Investigation of the gasphase of expanding Ar/CxHy plasmas

A. Graaf, de, M.F.A.M. Hest, van, K.G.Y. Letourneur, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 45th international symposium, Baltimore, November 2-6, 1998 : Abstracts
Publication statusPublished - 1998

Cite this