Investigation of a flat connector concept potential for low and medium vacuum conditions

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Abstract

Higher actuator voltages are required for future generation lithography machines to increase productivity. The operating pressures in combination with relevant insulation distances, can be situated near gas breakdown and cause partial discharge activity, making long-term damage conceivable. High voltage cone-shape connectors with pliable insulation can be applied for the low and medium vacuum range. However, materials and space are restricted making a cone shaped connector not ideal. In this paper, a flat connector concept is presented with a pliable insulation material allowed to be used for the aforementioned application. The permittivity of this material is measured and simulation results of the connector reveal critical design points. A prototype connector is made and its partial discharge inception voltage is characterized for the low and medium vacuum range. The results are discussed and compared with simulations.
Original languageEnglish
Title of host publication25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, Västerås, Sweden
Pages1-6
Number of pages6
DOIs
Publication statusPublished - 2017

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low vacuum
connectors
vacuum
insulation
cones
electric potential
productivity
high voltages
lithography
simulation
breakdown
actuators
prototypes
permittivity
damage
causes
gases

Cite this

Driessen, A. B. J. M., van Duivenbode, J., & Wouters, P. A. A. F. (2017). Investigation of a flat connector concept potential for low and medium vacuum conditions. In 25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, Västerås, Sweden (pp. 1-6) https://doi.org/10.5324/nordis.v0i25.2358
Driessen, A.B.J.M. ; van Duivenbode, J. ; Wouters, P.A.A.F. / Investigation of a flat connector concept potential for low and medium vacuum conditions. 25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, Västerås, Sweden. 2017. pp. 1-6
@inproceedings{2feed5ca16634f59a4d903df1f599d9a,
title = "Investigation of a flat connector concept potential for low and medium vacuum conditions",
abstract = "Higher actuator voltages are required for future generation lithography machines to increase productivity. The operating pressures in combination with relevant insulation distances, can be situated near gas breakdown and cause partial discharge activity, making long-term damage conceivable. High voltage cone-shape connectors with pliable insulation can be applied for the low and medium vacuum range. However, materials and space are restricted making a cone shaped connector not ideal. In this paper, a flat connector concept is presented with a pliable insulation material allowed to be used for the aforementioned application. The permittivity of this material is measured and simulation results of the connector reveal critical design points. A prototype connector is made and its partial discharge inception voltage is characterized for the low and medium vacuum range. The results are discussed and compared with simulations.",
author = "A.B.J.M. Driessen and {van Duivenbode}, J. and P.A.A.F. Wouters",
year = "2017",
doi = "10.5324/nordis.v0i25.2358",
language = "English",
pages = "1--6",
booktitle = "25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, V{\"a}ster{\aa}s, Sweden",

}

Driessen, ABJM, van Duivenbode, J & Wouters, PAAF 2017, Investigation of a flat connector concept potential for low and medium vacuum conditions. in 25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, Västerås, Sweden. pp. 1-6. https://doi.org/10.5324/nordis.v0i25.2358

Investigation of a flat connector concept potential for low and medium vacuum conditions. / Driessen, A.B.J.M.; van Duivenbode, J.; Wouters, P.A.A.F.

25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, Västerås, Sweden. 2017. p. 1-6.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Investigation of a flat connector concept potential for low and medium vacuum conditions

AU - Driessen, A.B.J.M.

AU - van Duivenbode, J.

AU - Wouters, P.A.A.F.

PY - 2017

Y1 - 2017

N2 - Higher actuator voltages are required for future generation lithography machines to increase productivity. The operating pressures in combination with relevant insulation distances, can be situated near gas breakdown and cause partial discharge activity, making long-term damage conceivable. High voltage cone-shape connectors with pliable insulation can be applied for the low and medium vacuum range. However, materials and space are restricted making a cone shaped connector not ideal. In this paper, a flat connector concept is presented with a pliable insulation material allowed to be used for the aforementioned application. The permittivity of this material is measured and simulation results of the connector reveal critical design points. A prototype connector is made and its partial discharge inception voltage is characterized for the low and medium vacuum range. The results are discussed and compared with simulations.

AB - Higher actuator voltages are required for future generation lithography machines to increase productivity. The operating pressures in combination with relevant insulation distances, can be situated near gas breakdown and cause partial discharge activity, making long-term damage conceivable. High voltage cone-shape connectors with pliable insulation can be applied for the low and medium vacuum range. However, materials and space are restricted making a cone shaped connector not ideal. In this paper, a flat connector concept is presented with a pliable insulation material allowed to be used for the aforementioned application. The permittivity of this material is measured and simulation results of the connector reveal critical design points. A prototype connector is made and its partial discharge inception voltage is characterized for the low and medium vacuum range. The results are discussed and compared with simulations.

U2 - 10.5324/nordis.v0i25.2358

DO - 10.5324/nordis.v0i25.2358

M3 - Conference contribution

SP - 1

EP - 6

BT - 25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, Västerås, Sweden

ER -

Driessen ABJM, van Duivenbode J, Wouters PAAF. Investigation of a flat connector concept potential for low and medium vacuum conditions. In 25th Nordic Insulation Symposium on Materials, Components and Diagnostics (NORD-IS 17), 19-21 June 2017, Västerås, Sweden. 2017. p. 1-6 https://doi.org/10.5324/nordis.v0i25.2358