Investigation of a CF4/Ar RF gas discharge

P.M. Vallinga; P.M. Meijer; A.J. Smits; F.J. Hoog, de

Investigation of a CF4/Ar RF gas discharge

P.M. Vallinga
, P.M. Meijer
, A.J. Smits
, F.J. Hoog, de

Applied Physics and Science Education

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1
Editors	K. Akashi, A. Kinbara
Place of Publication	Tokyo
Number of pages	6
Publication status	Published - 1987
Event	8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan - Tokyo, Japan Duration: 31 Aug 1987 → 4 Sept 1987 Conference number: 8

Conference

Conference	8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan
Abbreviated title	ISPC/Tokyo 1987
Country/Territory	Japan
City	Tokyo
Period	31/08/87 → 4/09/87

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Cite this

@inproceedings{2474dccf38fa43dbbbf310ac0435126d,

title = "Investigation of a CF4/Ar RF gas discharge",

author = "P.M. Vallinga and P.M. Meijer and A.J. Smits and \{Hoog, de\}, F.J.",

year = "1987",

language = "English",

editor = "K. Akashi and A. Kinbara",

booktitle = "ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1",

note = "8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan, ISPC/Tokyo 1987 ; Conference date: 31-08-1987 Through 04-09-1987",

}

TY - GEN

T1 - Investigation of a CF4/Ar RF gas discharge

AU - Vallinga, P.M.

AU - Meijer, P.M.

AU - Smits, A.J.

AU - Hoog, de, F.J.

N1 - Conference code: 8

PY - 1987

Y1 - 1987

M3 - Conference contribution

BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1

A2 - Akashi, K.

A2 - Kinbara, A.

CY - Tokyo

T2 - 8th International Symposium on Plasma Chemistry (ISPC 8), August 31-September 4, 1987, Tokyo, Japan

Y2 - 31 August 1987 through 4 September 1987

ER -