Investigation of a CF4/Ar RF gas discharge

P.M. Vallinga, P.M. Meijer, A.J. Smits, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

3 Downloads (Pure)
Original languageEnglish
Title of host publicationISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1
EditorsK. Akashi, A. Kinbara
Place of PublicationTokyo
Number of pages6
Publication statusPublished - 1987
Event8th International Symposium on Plasma Chemistry (ISPC 8) - Tokyo, Japan
Duration: 31 Aug 19874 Sep 1987
Conference number: 8

Conference

Conference8th International Symposium on Plasma Chemistry (ISPC 8)
Abbreviated titleISPC/Tokyo 1987
CountryJapan
CityTokyo
Period31/08/874/09/87

Cite this

Vallinga, P. M., Meijer, P. M., Smits, A. J., & Hoog, de, F. J. (1987). Investigation of a CF4/Ar RF gas discharge. In K. Akashi, & A. Kinbara (Eds.), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 Tokyo.
Vallinga, P.M. ; Meijer, P.M. ; Smits, A.J. ; Hoog, de, F.J. / Investigation of a CF4/Ar RF gas discharge. ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. editor / K. Akashi ; A. Kinbara. Tokyo, 1987.
@inproceedings{2474dccf38fa43dbbbf310ac0435126d,
title = "Investigation of a CF4/Ar RF gas discharge",
author = "P.M. Vallinga and P.M. Meijer and A.J. Smits and {Hoog, de}, F.J.",
year = "1987",
language = "English",
editor = "K. Akashi and A. Kinbara",
booktitle = "ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1",

}

Vallinga, PM, Meijer, PM, Smits, AJ & Hoog, de, FJ 1987, Investigation of a CF4/Ar RF gas discharge. in K Akashi & A Kinbara (eds), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. Tokyo, 8th International Symposium on Plasma Chemistry (ISPC 8), Tokyo, Japan, 31/08/87.

Investigation of a CF4/Ar RF gas discharge. / Vallinga, P.M.; Meijer, P.M.; Smits, A.J.; Hoog, de, F.J.

ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. ed. / K. Akashi; A. Kinbara. Tokyo, 1987.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Investigation of a CF4/Ar RF gas discharge

AU - Vallinga, P.M.

AU - Meijer, P.M.

AU - Smits, A.J.

AU - Hoog, de, F.J.

PY - 1987

Y1 - 1987

M3 - Conference contribution

BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1

A2 - Akashi, K.

A2 - Kinbara, A.

CY - Tokyo

ER -

Vallinga PM, Meijer PM, Smits AJ, Hoog, de FJ. Investigation of a CF4/Ar RF gas discharge. In Akashi K, Kinbara A, editors, ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. Tokyo. 1987