Investigation of a CF4/Ar RF gas discharge

P.M. Vallinga, P.M. Meijer, A.J. Smits, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1
EditorsK. Akashi, A. Kinbara
Place of PublicationTokyo
Number of pages6
Publication statusPublished - 1987
Event8th International Symposium on Plasma Chemistry (ISPC 8) - Tokyo, Japan
Duration: 31 Aug 19874 Sep 1987
Conference number: 8


Conference8th International Symposium on Plasma Chemistry (ISPC 8)
Abbreviated titleISPC/Tokyo 1987

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