TY - JOUR
T1 - Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding
AU - Sabahi-Kaviani, Rahman
AU - Luttge, Regina
N1 - Funding Information:
This work has received funding from the European Union’s Horizon 2020 Research And Innovation Programme H2020-FETPROACT-2018-01 under Grant Agreement No. 824070 and the collaboration project Nano+, which is a co-funded project by the PPP Allowance made available by Health∼Holland, Top Sector Life Sciences & Health, to stimulate public-private partnerships, under Grant Agreement No. LSHM19006. We thank Sijia Xie for the fabrication of the original COC master for the soft lithography utilizing J-FIL and thermal nanoimprint lithography at the University of Twente. Moreover, we thank the members of the Microfab/lab at the Eindhoven University of Technology for their experimental support, and specifically Alex J. Bastiaens for training on the soft lithography technique using the COC molds and Yagmur Demircan Yalcin for assisting in the microscopy and imaging of the differentiated neuronal stem cells.
Publisher Copyright:
© 2021 Author(s).
PY - 2021/12/1
Y1 - 2021/12/1
N2 - We demonstrated the microtransfer molding of Norland Optical Adhesive 81 (NOA81) thin films. NOA81 nanogrooves and flat thin films were transferred from a flexible polydimethylsiloxane (PDMS) working mold. In the case of nanogrooves, the mold's feature area of 15 × 15 mm2 contains a variety of pattern dimensions in a set of smaller nanogroove fields of a few mm2 each. We demonstrated that at least six microtransfers can be performed from the same PDMS working mold. Within the restriction of our atomic force microscopy measurement technique, nanogroove height varies with 82 ± 11 nm depending on the pattern dimensions of the measured fields. Respective micrographs of two of these fields, i.e., one field designated with narrower grooves (D1000L780, case 1) and the other designated with wider grooves (D1000L230, case 2) but with the same periodicity values, demonstrate faithful transfer of the patterns. The designated pattern dimensions refer to the periodicity (D) and the ridge width (L) in the original design process of the master mold (dimensional units are nm). In addition, neither NOA81 itself (flat films) nor NOA81 nanogroove thin films with a thickness of 1.6 μm deteriorate the imaging quality in optical cell microscopy.
AB - We demonstrated the microtransfer molding of Norland Optical Adhesive 81 (NOA81) thin films. NOA81 nanogrooves and flat thin films were transferred from a flexible polydimethylsiloxane (PDMS) working mold. In the case of nanogrooves, the mold's feature area of 15 × 15 mm2 contains a variety of pattern dimensions in a set of smaller nanogroove fields of a few mm2 each. We demonstrated that at least six microtransfers can be performed from the same PDMS working mold. Within the restriction of our atomic force microscopy measurement technique, nanogroove height varies with 82 ± 11 nm depending on the pattern dimensions of the measured fields. Respective micrographs of two of these fields, i.e., one field designated with narrower grooves (D1000L780, case 1) and the other designated with wider grooves (D1000L230, case 2) but with the same periodicity values, demonstrate faithful transfer of the patterns. The designated pattern dimensions refer to the periodicity (D) and the ridge width (L) in the original design process of the master mold (dimensional units are nm). In addition, neither NOA81 itself (flat films) nor NOA81 nanogroove thin films with a thickness of 1.6 μm deteriorate the imaging quality in optical cell microscopy.
UR - http://www.scopus.com/inward/record.url?scp=85120697348&partnerID=8YFLogxK
U2 - 10.1116/6.0001333
DO - 10.1116/6.0001333
M3 - Article
AN - SCOPUS:85120697348
SN - 2166-2746
VL - 39
JO - Journal of Vacuum Science and Technology B
JF - Journal of Vacuum Science and Technology B
IS - 6
M1 - 062810
ER -
