Introducing measure-by-wire, the systematic use of systems and control theory in transmission electron microscopy

Arturo Tejada; Arnold J. den Dekker; Wouter Van den Broek

doi:10.1016/j.ultramic.2011.08.011

Introducing measure-by-wire, the systematic use of systems and control theory in transmission electron microscopy

Arturo Tejada, Arnold J. den Dekker, Wouter Van den Broek

Research output: Contribution to journal › Article › Academic › peer-review

13 Citations (Scopus)

Abstract

Transmission electron microscopes (TEMs) are the tools of choice for academic and industrial research at the nano-scale. Due to their increasing use for routine, repetitive measurement tasks (e.g., quality control in production lines) there is a clear need for a new generation of high-throughput microscopes designed to autonomously extract information from specimens (e.g., particle size distribution, chemical composition, structural information, etc.).To aid in their development, a new engineering perspective on TEM design, based on principles from systems and control theory, is proposed here: measure-by- wire (not to be confused with remote microscopy). Under this perspective, the TEM operator yields the direct control of the microscope's internal processes to a hierarchy of feedback controllers and high-level supervisors. These make use of dynamical models of the main TEM components together with currently available measurement techniques to automate processes such as defocus correction or specimen displacement. Measure-by-wire is discussed in depth, and its methodology is illustrated through a detailed example: the design of a defocus regulator, a type of feedback controller that is akin to existing autofocus procedures.

Original language	English
Pages (from-to)	1581-1591
Number of pages	11
Journal	Ultramicroscopy
Volume	111
Issue number	11
DOIs	https://doi.org/10.1016/j.ultramic.2011.08.011
Publication status	Published - Nov 2011
Externally published	Yes

Bibliographical note

Funding Information:
This work is carried out as part of the Condor project, a project under the supervision of the Embedded Systems Institute (ESI) and with FEI company as the industrial partner. This project is partially supported by the Dutch Ministry of Economic Affairs under the BSIK program. The authors also acknowledge Dr. Sandra Van Aert (EMAT, U. Antwerp) for the fruitful discussions on TEM technology; Dr. Richard Doornbos (ESI) and Dr. Seyno Sluyterman (FEI Company) for their help in the experimental setups; Ir. Stefan Kuiper (DCSC) for his insights in automatic control concepts; and Professors Dirk Van Dyck and Paul M.J. Van den Hof for their help in sharpening the ideas presented here.

Keywords

Defocus control
Flexible TEM
High-throughput
Systems and control
Thon ring analysis

Access to Document

10.1016/j.ultramic.2011.08.011

Cite this

@article{669b85e3164e46a989581d22844f246c,

title = "Introducing measure-by-wire, the systematic use of systems and control theory in transmission electron microscopy",

abstract = "Transmission electron microscopes (TEMs) are the tools of choice for academic and industrial research at the nano-scale. Due to their increasing use for routine, repetitive measurement tasks (e.g., quality control in production lines) there is a clear need for a new generation of high-throughput microscopes designed to autonomously extract information from specimens (e.g., particle size distribution, chemical composition, structural information, etc.).To aid in their development, a new engineering perspective on TEM design, based on principles from systems and control theory, is proposed here: measure-by- wire (not to be confused with remote microscopy). Under this perspective, the TEM operator yields the direct control of the microscope's internal processes to a hierarchy of feedback controllers and high-level supervisors. These make use of dynamical models of the main TEM components together with currently available measurement techniques to automate processes such as defocus correction or specimen displacement. Measure-by-wire is discussed in depth, and its methodology is illustrated through a detailed example: the design of a defocus regulator, a type of feedback controller that is akin to existing autofocus procedures.",

keywords = "Defocus control, Flexible TEM, High-throughput, Systems and control, Thon ring analysis",

author = "Arturo Tejada and {den Dekker}, {Arnold J.} and {Van den Broek}, Wouter",

note = "Funding Information: This work is carried out as part of the Condor project, a project under the supervision of the Embedded Systems Institute (ESI) and with FEI company as the industrial partner. This project is partially supported by the Dutch Ministry of Economic Affairs under the BSIK program. The authors also acknowledge Dr. Sandra Van Aert (EMAT, U. Antwerp) for the fruitful discussions on TEM technology; Dr. Richard Doornbos (ESI) and Dr. Seyno Sluyterman (FEI Company) for their help in the experimental setups; Ir. Stefan Kuiper (DCSC) for his insights in automatic control concepts; and Professors Dirk Van Dyck and Paul M.J. Van den Hof for their help in sharpening the ideas presented here. ",

year = "2011",

month = nov,

doi = "10.1016/j.ultramic.2011.08.011",

language = "English",

volume = "111",

pages = "1581--1591",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier B.V.",

number = "11",

}

TY - JOUR

T1 - Introducing measure-by-wire, the systematic use of systems and control theory in transmission electron microscopy

AU - Tejada, Arturo

AU - den Dekker, Arnold J.

AU - Van den Broek, Wouter

N1 - Funding Information: This work is carried out as part of the Condor project, a project under the supervision of the Embedded Systems Institute (ESI) and with FEI company as the industrial partner. This project is partially supported by the Dutch Ministry of Economic Affairs under the BSIK program. The authors also acknowledge Dr. Sandra Van Aert (EMAT, U. Antwerp) for the fruitful discussions on TEM technology; Dr. Richard Doornbos (ESI) and Dr. Seyno Sluyterman (FEI Company) for their help in the experimental setups; Ir. Stefan Kuiper (DCSC) for his insights in automatic control concepts; and Professors Dirk Van Dyck and Paul M.J. Van den Hof for their help in sharpening the ideas presented here.

PY - 2011/11

Y1 - 2011/11

N2 - Transmission electron microscopes (TEMs) are the tools of choice for academic and industrial research at the nano-scale. Due to their increasing use for routine, repetitive measurement tasks (e.g., quality control in production lines) there is a clear need for a new generation of high-throughput microscopes designed to autonomously extract information from specimens (e.g., particle size distribution, chemical composition, structural information, etc.).To aid in their development, a new engineering perspective on TEM design, based on principles from systems and control theory, is proposed here: measure-by- wire (not to be confused with remote microscopy). Under this perspective, the TEM operator yields the direct control of the microscope's internal processes to a hierarchy of feedback controllers and high-level supervisors. These make use of dynamical models of the main TEM components together with currently available measurement techniques to automate processes such as defocus correction or specimen displacement. Measure-by-wire is discussed in depth, and its methodology is illustrated through a detailed example: the design of a defocus regulator, a type of feedback controller that is akin to existing autofocus procedures.

AB - Transmission electron microscopes (TEMs) are the tools of choice for academic and industrial research at the nano-scale. Due to their increasing use for routine, repetitive measurement tasks (e.g., quality control in production lines) there is a clear need for a new generation of high-throughput microscopes designed to autonomously extract information from specimens (e.g., particle size distribution, chemical composition, structural information, etc.).To aid in their development, a new engineering perspective on TEM design, based on principles from systems and control theory, is proposed here: measure-by- wire (not to be confused with remote microscopy). Under this perspective, the TEM operator yields the direct control of the microscope's internal processes to a hierarchy of feedback controllers and high-level supervisors. These make use of dynamical models of the main TEM components together with currently available measurement techniques to automate processes such as defocus correction or specimen displacement. Measure-by-wire is discussed in depth, and its methodology is illustrated through a detailed example: the design of a defocus regulator, a type of feedback controller that is akin to existing autofocus procedures.

KW - Defocus control

KW - Flexible TEM

KW - High-throughput

KW - Systems and control

KW - Thon ring analysis

UR - http://www.scopus.com/inward/record.url?scp=80053175120&partnerID=8YFLogxK

U2 - 10.1016/j.ultramic.2011.08.011

DO - 10.1016/j.ultramic.2011.08.011

M3 - Article

C2 - 21945998

AN - SCOPUS:80053175120

SN - 0304-3991

VL - 111

SP - 1581

EP - 1591

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 11

ER -

Introducing measure-by-wire, the systematic use of systems and control theory in transmission electron microscopy

Abstract

Bibliographical note

Keywords

Access to Document

Other files and links

Fingerprint

Cite this