Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 67-73 |
| Journal | Metrologia |
| Volume | 33 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1996 |
Fingerprint
Cite this
}
International comparison of roundness profiles with nanometric accuracy. / Haitjema, H.; Bosse, H.; Frennberg, M.
In: Metrologia, Vol. 33, No. 1, 1996, p. 67-73.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - International comparison of roundness profiles with nanometric accuracy
AU - Haitjema, H.
AU - Bosse, H.
AU - Frennberg, M.
PY - 1996
Y1 - 1996
N2 - Roundness profiles are compared which were obtained from measurements carried out at five national metrology laboratories. In the analysis, standard deviations and maximum deviations were calculated from point-by-point differences of the profiles with reference to one another or to the reference profile. Fourier analysis was used to select a spectral area for an analysis at the edge of the significance limit. The comparison shown that each participating laboratory is able to measure a roundness profile with a standard deviation in each data point of less than 2 nm.
AB - Roundness profiles are compared which were obtained from measurements carried out at five national metrology laboratories. In the analysis, standard deviations and maximum deviations were calculated from point-by-point differences of the profiles with reference to one another or to the reference profile. Fourier analysis was used to select a spectral area for an analysis at the edge of the significance limit. The comparison shown that each participating laboratory is able to measure a roundness profile with a standard deviation in each data point of less than 2 nm.
U2 - 10.1088/0026-1394/33/1/9
DO - 10.1088/0026-1394/33/1/9
M3 - Article
VL - 33
SP - 67
EP - 73
JO - Metrologia
JF - Metrologia
SN - 0026-1394
IS - 1
ER -