International comparison of roundness profiles with nanometric accuracy

H. Haitjema, H. Bosse, M. Frennberg

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

Abstract

Roundness profiles are compared which were obtained from measurements carried out at five national metrology laboratories. In the analysis, standard deviations and maximum deviations were calculated from point-by-point differences of the profiles with reference to one another or to the reference profile. Fourier analysis was used to select a spectral area for an analysis at the edge of the significance limit. The comparison shown that each participating laboratory is able to measure a roundness profile with a standard deviation in each data point of less than 2 nm.
Original languageEnglish
Pages (from-to)67-73
JournalMetrologia
Volume33
Issue number1
DOIs
Publication statusPublished - 1996

Fingerprint

Fourier analysis

Cite this

Haitjema, H. ; Bosse, H. ; Frennberg, M. / International comparison of roundness profiles with nanometric accuracy. In: Metrologia. 1996 ; Vol. 33, No. 1. pp. 67-73.
@article{c5c498f918724120bc8ba2fe85469b10,
title = "International comparison of roundness profiles with nanometric accuracy",
abstract = "Roundness profiles are compared which were obtained from measurements carried out at five national metrology laboratories. In the analysis, standard deviations and maximum deviations were calculated from point-by-point differences of the profiles with reference to one another or to the reference profile. Fourier analysis was used to select a spectral area for an analysis at the edge of the significance limit. The comparison shown that each participating laboratory is able to measure a roundness profile with a standard deviation in each data point of less than 2 nm.",
author = "H. Haitjema and H. Bosse and M. Frennberg",
year = "1996",
doi = "10.1088/0026-1394/33/1/9",
language = "English",
volume = "33",
pages = "67--73",
journal = "Metrologia",
issn = "0026-1394",
publisher = "Institute of Physics",
number = "1",

}

International comparison of roundness profiles with nanometric accuracy. / Haitjema, H.; Bosse, H.; Frennberg, M.

In: Metrologia, Vol. 33, No. 1, 1996, p. 67-73.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - International comparison of roundness profiles with nanometric accuracy

AU - Haitjema, H.

AU - Bosse, H.

AU - Frennberg, M.

PY - 1996

Y1 - 1996

N2 - Roundness profiles are compared which were obtained from measurements carried out at five national metrology laboratories. In the analysis, standard deviations and maximum deviations were calculated from point-by-point differences of the profiles with reference to one another or to the reference profile. Fourier analysis was used to select a spectral area for an analysis at the edge of the significance limit. The comparison shown that each participating laboratory is able to measure a roundness profile with a standard deviation in each data point of less than 2 nm.

AB - Roundness profiles are compared which were obtained from measurements carried out at five national metrology laboratories. In the analysis, standard deviations and maximum deviations were calculated from point-by-point differences of the profiles with reference to one another or to the reference profile. Fourier analysis was used to select a spectral area for an analysis at the edge of the significance limit. The comparison shown that each participating laboratory is able to measure a roundness profile with a standard deviation in each data point of less than 2 nm.

U2 - 10.1088/0026-1394/33/1/9

DO - 10.1088/0026-1394/33/1/9

M3 - Article

VL - 33

SP - 67

EP - 73

JO - Metrologia

JF - Metrologia

SN - 0026-1394

IS - 1

ER -