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Abstract
We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane photonic crystal cavities. We demonstrate free-space and waveguide coupling schemes for the input light, while the readout is provided by an integrated quantum dot photodiode.
Original language | English |
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Title of host publication | 2017 International Conference on Optical MEMS and Nanophotonics (OMN), 13-17 August 2017, Santa Fe, New Mexico |
Place of Publication | Piscataway |
Publisher | Institute of Electrical Engineers |
Pages | 1-2 |
ISBN (Electronic) | 978-1-5386-0737-4 |
ISBN (Print) | 978-1-5386-0738-1 |
DOIs | |
Publication status | Published - 26 Sept 2017 |
Event | 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States Duration: 13 Aug 2017 → 17 Aug 2017 |
Conference
Conference | 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 |
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Country/Territory | United States |
City | Santa Fe |
Period | 13/08/17 → 17/08/17 |
Keywords
- integrated sensor
- Microspectrometer
- nano-opto-electro-mechanical system
- photonic crystal
Fingerprint
Dive into the research topics of 'Integrated spectrometer and displacement sensor based on mechanically tunable photonic crystals'. Together they form a unique fingerprint.Projects
- 1 Active
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Zwaartekracht PSN Research Centre for Integrated Nanophotonics
Fiore, A. (Project Manager), Petruzzella, M. (Project member), Curto, A. G. (Project member), Godiksen, R. H. (Project member), Picelli, L. (Project member), Smit, M. (Project member), Al-Daffaie, S. (Project member), Banfi, E. (Project member), van Elst, D. M. J. (Project member), Verstijnen, T. J. F. (Project member), Perez Sosa, M. (Project member), Liang, M. (Project member), van Veldhoven, P. J. (Project member), Pagliano, F. (Project member), Buntinx, S. (Project member), Koenraad, P. M. (Project member) & Silov, A. Y. (Project member)
1/01/14 → 31/01/25
Project: First tier