Integrated spectrometer and displacement sensor based on mechanically tunable photonic crystals

Z. Zobenica, R.W. Van Der Heijden, M. Petruzzella, F. Pagliano, T. Xia, L. Midolo, M. Cotrufo, Y. J. Cho, F.W.M. Van Otten, A. Fiore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane photonic crystal cavities. We demonstrate free-space and waveguide coupling schemes for the input light, while the readout is provided by an integrated quantum dot photodiode.

Original languageEnglish
Title of host publication2017 International Conference on Optical MEMS and Nanophotonics (OMN), 13-17 August 2017, Santa Fe, New Mexico
Place of PublicationPiscataway
PublisherInstitute of Electrical Engineers
Pages1-2
ISBN (Electronic)978-1-5386-0737-4
ISBN (Print)978-1-5386-0738-1
DOIs
Publication statusPublished - 26 Sep 2017
Event22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States
Duration: 13 Aug 201717 Aug 2017

Conference

Conference22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
CountryUnited States
CitySanta Fe
Period13/08/1717/08/17

Keywords

  • integrated sensor
  • Microspectrometer
  • nano-opto-electro-mechanical system
  • photonic crystal

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