Abstract
We report a nanophotonic sensor where the key functionalities of actuation, sensing and read-out are integrated in the same device. It is based on electromechanically-tuneable double-membrane photonic crystal cavities, where the resonant wavelength depends on the separation between the membranes. The output is provided directly in the form of a current, removing the need for external optical read-out. It can be used to measure the spectrum of incident light, to determine the wavelength of a laser line with pm-range resolution, or equivalently to measure tiny displacements. Additionally, the integrated actuation makes it suitable for applications where motion control is needed. (9755-51)
Original language | English |
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Publication status | Published - Feb 2016 |
Event | SPIE Photonics West 2016, Quantum Sensing and Nano Electronics and Photonics XIII - San Francisco, United States Duration: 13 Feb 2016 → 18 Feb 2016 |
Conference
Conference | SPIE Photonics West 2016, Quantum Sensing and Nano Electronics and Photonics XIII |
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Country/Territory | United States |
City | San Francisco |
Period | 13/02/16 → 18/02/16 |