Integrated spectral and displacement sensors based on nanomechanical photonic crystals

Z. Zobenica, R.W. van der Heijden, M. Petruzzella, F. Pagliano, T. Xia, L. Midolo, Y. Cho, F.W.M. van Otten, A. Fiore

Research output: Contribution to conferenceAbstractAcademic

Abstract

We report a nanophotonic sensor where the key functionalities of actuation, sensing and read-out are integrated in the same device. It is based on electromechanically-tuneable double-membrane photonic crystal cavities, where the resonant wavelength depends on the separation between the membranes. The output is provided directly in the form of a current, removing the need for external optical read-out. It can be used to measure the spectrum of incident light, to determine the wavelength of a laser line with pm-range resolution, or equivalently to measure tiny displacements. Additionally, the integrated actuation makes it suitable for applications where motion control is needed. (9755-51)
Original languageEnglish
Publication statusPublished - Feb 2016
EventSPIE Photonics West 2016, Quantum Sensing and Nano Electronics and Photonics XIII - San Francisco, United States
Duration: 13 Feb 201618 Feb 2016

Conference

ConferenceSPIE Photonics West 2016, Quantum Sensing and Nano Electronics and Photonics XIII
CountryUnited States
CitySan Francisco
Period13/02/1618/02/16

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