Integrated simulation in EUV source

T.P.M. Boshoven

Research output: Thesis › EngD Thesis

445 Downloads (Pure)

Original language	English
Supervisors/Advisors	Cuijpers, Pieter J.L., Supervisor Ernest Mithun, Xavier Lobo, External supervisor Coppelmans, Dirk, External supervisor, External person
Award date	25 Sept 2015
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-444-1389-2
Publication status	Published - 25 Sept 2015

Eindverslag. - Public version

Access to Document

@phdthesis{cefa82191cdd43029579272c85c1729d,

title = "Integrated simulation in EUV source",

author = "T.P.M. Boshoven",

note = "Eindverslag. - Public version",

year = "2015",

month = sep,

day = "25",

language = "English",

isbn = "978-90-444-1389-2",

series = "PDEng rapport",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}