Integrated optomechanical displacement sensor based on a photonic crystal cavity

Federico Galeotti; Ivana Sersic-Vollenbroek; Maurangelo Petruzzella; Francesco Pagliano; Zarko Zobenica; Frank W.M. van Otten; Hamed Sadeghian Marnani; Rob van der Heijden; Andrea Fiore

doi:10.1109/OMN.2018.8454635

Integrated optomechanical displacement sensor based on a photonic crystal cavity

Federico Galeotti, Ivana Sersic-Vollenbroek, Maurangelo Petruzzella, Francesco Pagliano, Zarko Zobenica, Frank W.M. van Otten, Hamed Sadeghian Marnani, Rob van der Heijden, Andrea Fiore

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

7 Downloads (Pure)

Abstract

Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781509063727
DOIs	https://doi.org/10.1109/OMN.2018.8454635
Publication status	Published - 4 Sept 2018
Event	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland Duration: 29 Jul 2018 → 2 Aug 2018

Conference

Conference	23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
Country/Territory	Switzerland
City	Lausanne
Period	29/07/18 → 2/08/18

Keywords

motion detection
opto-mechanical sensor
photonic crystal
semiconductor nanophotonics

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10.1109/OMN.2018.8454635

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Galeotti, F., Sersic-Vollenbroek, I., Petruzzella, M., Pagliano, F., Zobenica, Z., van Otten, F. W. M., Marnani, H. S., van der Heijden, R., & Fiore, A. (2018). Integrated optomechanical displacement sensor based on a photonic crystal cavity. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings [MO-3.4] IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454635

@inproceedings{d7f1e59af4a644e294f19676559095e7,

title = "Integrated optomechanical displacement sensor based on a photonic crystal cavity",

abstract = "Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.",

keywords = "motion detection, opto-mechanical sensor, photonic crystal, semiconductor nanophotonics",

author = "Federico Galeotti and Ivana Sersic-Vollenbroek and Maurangelo Petruzzella and Francesco Pagliano and Zarko Zobenica and {van Otten}, {Frank W.M.} and Marnani, {Hamed Sadeghian} and {van der Heijden}, Rob and Andrea Fiore",

year = "2018",

month = sep,

day = "4",

doi = "10.1109/OMN.2018.8454635",

language = "English",

isbn = "9781509063727",

booktitle = "International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings",

publisher = "IEEE Computer Society",

address = "United States",

note = "23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 ; Conference date: 29-07-2018 Through 02-08-2018",

}

Galeotti, F, Sersic-Vollenbroek, I, Petruzzella, M , Pagliano, F, Zobenica, Z, van Otten, FWM, Marnani, HS, van der Heijden, R & Fiore, A 2018, Integrated optomechanical displacement sensor based on a photonic crystal cavity. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings., MO-3.4, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 29/07/18. https://doi.org/10.1109/OMN.2018.8454635

Integrated optomechanical displacement sensor based on a photonic crystal cavity. / Galeotti, Federico; Sersic-Vollenbroek, Ivana; Petruzzella, Maurangelo et al.
International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, 2018. MO-3.4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Integrated optomechanical displacement sensor based on a photonic crystal cavity

AU - Galeotti, Federico

AU - Sersic-Vollenbroek, Ivana

AU - Petruzzella, Maurangelo

AU - Pagliano, Francesco

AU - Zobenica, Zarko

AU - van Otten, Frank W.M.

AU - Marnani, Hamed Sadeghian

AU - van der Heijden, Rob

AU - Fiore, Andrea

PY - 2018/9/4

Y1 - 2018/9/4

N2 - Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.

AB - Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.

KW - motion detection

KW - opto-mechanical sensor

KW - photonic crystal

KW - semiconductor nanophotonics

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U2 - 10.1109/OMN.2018.8454635

DO - 10.1109/OMN.2018.8454635

M3 - Conference contribution

AN - SCOPUS:85053867487

SN - 9781509063727

BT - International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings

PB - IEEE Computer Society

T2 - 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018

Y2 - 29 July 2018 through 2 August 2018

ER -

Integrated optomechanical displacement sensor based on a photonic crystal cavity

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