Integrated optomechanical displacement sensor based on a photonic crystal cavity

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.

LanguageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781509063727
DOIs
StatePublished - 4 Sep 2018
Event23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
Duration: 29 Jul 20182 Aug 2018

Conference

Conference23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
CountrySwitzerland
CityLausanne
Period29/07/182/08/18

Fingerprint

Electromechanical devices
Photonic crystals
Atomic force microscopy
Waveguides
Membranes
Sensors
Costs

Keywords

  • motion detection
  • opto-mechanical sensor
  • photonic crystal
  • semiconductor nanophotonics

Cite this

Galeotti, F., Sersic-Vollenbroek, I., Petruzzella, M., Pagliano, F., Zobenica, Z., van Otten, F. W. M., ... Fiore, A. (2018). Integrated optomechanical displacement sensor based on a photonic crystal cavity. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings [MO-3.4] IEEE Computer Society. DOI: 10.1109/OMN.2018.8454635
Galeotti, Federico ; Sersic-Vollenbroek, Ivana ; Petruzzella, Maurangelo ; Pagliano, Francesco ; Zobenica, Zarko ; van Otten, Frank W.M. ; Marnani, Hamed Sadeghian ; van der Heijden, Rob ; Fiore, Andrea. / Integrated optomechanical displacement sensor based on a photonic crystal cavity. International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, 2018.
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abstract = "Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.",
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author = "Federico Galeotti and Ivana Sersic-Vollenbroek and Maurangelo Petruzzella and Francesco Pagliano and Zarko Zobenica and {van Otten}, {Frank W.M.} and Marnani, {Hamed Sadeghian} and {van der Heijden}, Rob and Andrea Fiore",
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Galeotti, F, Sersic-Vollenbroek, I, Petruzzella, M, Pagliano, F, Zobenica, Z, van Otten, FWM, Marnani, HS, van der Heijden, R & Fiore, A 2018, Integrated optomechanical displacement sensor based on a photonic crystal cavity. in International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings., MO-3.4, IEEE Computer Society, 23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, Lausanne, Switzerland, 29/07/18. DOI: 10.1109/OMN.2018.8454635

Integrated optomechanical displacement sensor based on a photonic crystal cavity. / Galeotti, Federico; Sersic-Vollenbroek, Ivana; Petruzzella, Maurangelo; Pagliano, Francesco; Zobenica, Zarko; van Otten, Frank W.M.; Marnani, Hamed Sadeghian; van der Heijden, Rob; Fiore, Andrea.

International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society, 2018. MO-3.4.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Integrated optomechanical displacement sensor based on a photonic crystal cavity

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AU - Zobenica,Zarko

AU - van Otten,Frank W.M.

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N2 - Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.

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KW - opto-mechanical sensor

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Galeotti F, Sersic-Vollenbroek I, Petruzzella M, Pagliano F, Zobenica Z, van Otten FWM et al. Integrated optomechanical displacement sensor based on a photonic crystal cavity. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings. IEEE Computer Society. 2018. MO-3.4. Available from, DOI: 10.1109/OMN.2018.8454635