Integrated optomechanical displacement sensor based on a photonic crystal cavity

Federico Galeotti, Ivana Sersic-Vollenbroek, Maurangelo Petruzzella, Francesco Pagliano, Zarko Zobenica, Frank W.M. van Otten, Hamed Sadeghian Marnani, Rob van der Heijden, Andrea Fiore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
6 Downloads (Pure)

Abstract

Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781509063727
DOIs
Publication statusPublished - 4 Sep 2018
Event23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
Duration: 29 Jul 20182 Aug 2018

Conference

Conference23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
CountrySwitzerland
CityLausanne
Period29/07/182/08/18

Keywords

  • motion detection
  • opto-mechanical sensor
  • photonic crystal
  • semiconductor nanophotonics

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