Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives

P. Mächtle, R. Berger, A.H. Dietzel, M. Despont, W. Häberle, G.K. Binnig, P. Vettiger

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

37 Citations (Scopus)
Original languageEnglish
Title of host publicationMEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems
Place of PublicationSwitzerland, Interlaken
Publication statusPublished - 2001

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