Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives

P. Mächtle, R. Berger, A.H. Dietzel, M. Despont, W. Häberle, G.K. Binnig, P. Vettiger

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

35 Citations (Scopus)
Original languageEnglish
Title of host publicationMEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems
Place of PublicationSwitzerland, Interlaken
Publication statusPublished - 2001

Cite this

Mächtle, P., Berger, R., Dietzel, A. H., Despont, M., Häberle, W., Binnig, G. K., & Vettiger, P. (2001). Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives. In MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems