Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives

P. Mächtle, R. Berger, A.H. Dietzel, M. Despont, W. Häberle, G.K. Binnig, P. Vettiger

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems
Place of Publication	Switzerland, Interlaken
Publication status	Published - 2001

Cite this

@inproceedings{e175c3489df142f3b7acf08a7b543857,

title = "Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives",

author = "P. M{\"a}chtle and R. Berger and A.H. Dietzel and M. Despont and W. H{\"a}berle and G.K. Binnig and P. Vettiger",

year = "2001",

language = "English",

booktitle = "MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems",

}

Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives. / Mächtle, P.; Berger, R.; Dietzel, A.H. et al.
MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems. Switzerland, Interlaken, 2001.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives

AU - Mächtle, P.

AU - Berger, R.

AU - Dietzel, A.H.

AU - Despont, M.

AU - Häberle, W.

AU - Binnig, G.K.

AU - Vettiger, P.

PY - 2001

Y1 - 2001

M3 - Conference contribution

BT - MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems

CY - Switzerland, Interlaken

ER -