TY - JOUR
T1 - Integrated design of the feedback controller and topography estimator for atomic force microscopy
AU - Kuiper, S.
AU - Hof, Van den, P.M.J.
AU - Schitter, G.
PY - 2013
Y1 - 2013
N2 - In atomic force microscopy (AFM) the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage of the tip and sample during imaging, and to convert the measurement of the tip–sample force into an estimate of the sample topography. Dynamical uncertainties of the system limit the achievable control bandwidth and the accuracy of the topography estimation. This paper presents an integrated approach to design a feedback controller and topography estimator, taking into account the dynamical uncertainties of the system. The proposed methodology is experimentally demonstrated on a commercial AFM system, showing a direct trade-off between the control bandwidth and the accuracy of the topography estimation.
AB - In atomic force microscopy (AFM) the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage of the tip and sample during imaging, and to convert the measurement of the tip–sample force into an estimate of the sample topography. Dynamical uncertainties of the system limit the achievable control bandwidth and the accuracy of the topography estimation. This paper presents an integrated approach to design a feedback controller and topography estimator, taking into account the dynamical uncertainties of the system. The proposed methodology is experimentally demonstrated on a commercial AFM system, showing a direct trade-off between the control bandwidth and the accuracy of the topography estimation.
U2 - 10.1016/j.conengprac.2013.03.006
DO - 10.1016/j.conengprac.2013.03.006
M3 - Article
SN - 0967-0661
VL - 21
SP - 1110
EP - 1120
JO - Control Engineering Practice
JF - Control Engineering Practice
IS - 8
ER -