InP MEMS Mach-Zehnder interferometer optical switch on silicon

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Abstract

In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.

Original languageEnglish
Title of host publication2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages1
ISBN (Electronic)978-1-7281-0469-0
DOIs
Publication statusPublished - 1 Jun 2019
Event2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Germany
Duration: 23 Jun 201927 Jun 2019

Conference

Conference2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
CountryGermany
CityMunich
Period23/06/1927/06/19

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Cite this

Liu, T., Pagliano, F., van Veldhoven, R., Pogoretskii, V., Jiao, Y., & Fiore, A. (2019). InP MEMS Mach-Zehnder interferometer optical switch on silicon. In 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 [8872336] Piscataway: Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CLEOE-EQEC.2019.8872336