InP MEMS Mach-Zehnder interferometer optical switch on silicon

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.

Original languageEnglish
Title of host publication2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages1
ISBN (Electronic)978-1-7281-0469-0
DOIs
Publication statusPublished - 1 Jun 2019
Event2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Germany
Duration: 23 Jun 201927 Jun 2019

Conference

Conference2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
CountryGermany
CityMunich
Period23/06/1927/06/19

Fingerprint

Mach-Zehnder interferometers
Optical switches
Silicon
Photonics
microelectromechanical systems
MEMS
switches
chips
Switches
Light amplifiers
silicon
photonics
adhesive bonding
Integrated circuits
Adhesives
C band
Detectors
Membranes
Bandwidth
actuation

Cite this

Liu, T., Pagliano, F., van Veldhoven, R., Pogoretskii, V., Jiao, Y., & Fiore, A. (2019). InP MEMS Mach-Zehnder interferometer optical switch on silicon. In 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 [8872336] Piscataway: Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CLEOE-EQEC.2019.8872336
Liu, Tianran ; Pagliano, Francesco ; van Veldhoven, René ; Pogoretskii, Vadim ; Jiao, Yuqing ; Fiore, Andrea. / InP MEMS Mach-Zehnder interferometer optical switch on silicon. 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019. Piscataway : Institute of Electrical and Electronics Engineers, 2019.
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title = "InP MEMS Mach-Zehnder interferometer optical switch on silicon",
abstract = "In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.",
author = "Tianran Liu and Francesco Pagliano and {van Veldhoven}, Ren{\'e} and Vadim Pogoretskii and Yuqing Jiao and Andrea Fiore",
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Liu, T, Pagliano, F, van Veldhoven, R, Pogoretskii, V, Jiao, Y & Fiore, A 2019, InP MEMS Mach-Zehnder interferometer optical switch on silicon. in 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019., 8872336, Institute of Electrical and Electronics Engineers, Piscataway, 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019, Munich, Germany, 23/06/19. https://doi.org/10.1109/CLEOE-EQEC.2019.8872336

InP MEMS Mach-Zehnder interferometer optical switch on silicon. / Liu, Tianran; Pagliano, Francesco; van Veldhoven, René; Pogoretskii, Vadim; Jiao, Yuqing; Fiore, Andrea.

2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019. Piscataway : Institute of Electrical and Electronics Engineers, 2019. 8872336.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AB - In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.

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Liu T, Pagliano F, van Veldhoven R, Pogoretskii V, Jiao Y, Fiore A. InP MEMS Mach-Zehnder interferometer optical switch on silicon. In 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019. Piscataway: Institute of Electrical and Electronics Engineers. 2019. 8872336 https://doi.org/10.1109/CLEOE-EQEC.2019.8872336