@inproceedings{b0711ec1ccdd40dea6cc57334ee9f6d0,
title = "InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching",
author = "{Tol, van der}, J.J.G.M. and M. Silova and F. Karouta and R.G. Broeke and H.H. Tan and C. Jagadish and E. Smalbrugge and {Roy, van}, B.H.",
year = "2000",
language = "English",
isbn = "90-9014260.6",
pages = "127--130",
editor = "X.J.M. Leijtens and {Besten, den}, J.H.",
booktitle = "Proceedings of the 5th annual symposium of the IEEE/LEOS Benelux Chapter : October 30, 2000, Delft , the Netherlands",
publisher = "Technische Universiteit Delft",
address = "Netherlands",
note = "5th Annual Symposium of the IEEE/LEOS Benelux Chapter ; Conference date: 30-10-2000 Through 30-10-2000",
}