InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

J.J.G.M. Tol, van der, M. Silova, F. Karouta, R.G. Broeke, H.H. Tan, C. Jagadish, E. Smalbrugge, B.H. Roy, van

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 5th annual symposium of the IEEE/LEOS Benelux Chapter : October 30, 2000, Delft , the Netherlands
EditorsX.J.M. Leijtens, J.H. Besten, den
Place of PublicationDelft
PublisherDelft University of Technology
ISBN (Print)90-9014260.6
Publication statusPublished - 2000
Event5th Annual Symposium of the IEEE/LEOS Benelux Chapter - Delft, Netherlands
Duration: 30 Oct 200030 Oct 2000


Conference5th Annual Symposium of the IEEE/LEOS Benelux Chapter
OtherIEEE/LEOS symposium

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