We demonstrate a compact photodetector suitable for photonic interconnections on electronic ICs. In such applications, the InP-based optical sources and detectors are linked
via Si photonic waveguides in an interconnection layer on top of the CMOS circuitry.
The photonic device processing is compatible with Si wafer scale fabrication steps, which
guarantees compatibility with future IC manufacturing. In our approach, an InP membrane
waveguide is used to couple the light out of the interconnection layer and carry it towards the detector absorption region. A responsivity of 0.45 A/W and an electrical frequency response 3-dB cut-off point at 15 GHz were measured.
|Title of host publication||Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium|
|Editors||Ph. Emplit, M. Delqué, S.P. Gorza, P. Kockaert, X.J.M. Leijtens|
|Place of Publication||Brussels|
|Publication status||Published - 2007|
|Event||12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium - Brussels, Belgium|
Duration: 17 Dec 2007 → 18 Dec 2007
|Conference||12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium|
|Period||17/12/07 → 18/12/07|