InP-based membrane photodetector for optical interconnections on CMOS ICs

P.R.A. Binetti; X.J.M. Leijtens; Antonio La Porta; M. Nikoufard; T. Vries, de; Y.S. Oei; L. Di Cioccio; J.-M. Fédéli; C. Lagahe; R. Orobtchouk; C. Seassal; J. Van Campenhout; D. Thourhout, Van; P.J. Veldhoven, van; R. Nötzel; M.K. Smit

InP-based membrane photodetector for optical interconnections on CMOS ICs

P.R.A. Binetti, X.J.M. Leijtens, Antonio La Porta, M. Nikoufard, T. Vries, de, Y.S. Oei, L. Di Cioccio, J.-M. Fédéli, C. Lagahe, R. Orobtchouk, C. Seassal, J. Van Campenhout, D. Thourhout, Van, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We demonstrate a compact photodetector suitable for photonic interconnections on electronic ICs. In such applications, the InP-based optical sources and detectors are linked via Si photonic waveguides in an interconnection layer on top of the CMOS circuitry. The photonic device processing is compatible with Si wafer scale fabrication steps, which guarantees compatibility with future IC manufacturing. In our approach, an InP membrane waveguide is used to couple the light out of the interconnection layer and carry it towards the detector absorption region. A responsivity of 0.45 A/W and an electrical frequency response 3-dB cut-off point at 15 GHz were measured.

Original language	English
Title of host publication	Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium
Editors	Ph. Emplit, M. Delqué, S.P. Gorza, P. Kockaert, X.J.M. Leijtens
Place of Publication	Brussels
Publisher	IEEE/LEOS
Pages	83-86
ISBN (Print)	978-2-9600753-0-4
Publication status	Published - 2007
Event	12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium - Brussels, Belgium Duration: 17 Dec 2007 → 18 Dec 2007

Conference

Conference	12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium
Country/Territory	Belgium
City	Brussels
Period	17/12/07 → 18/12/07

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Binetti, P. R. A., Leijtens, X. J. M., La Porta, A., Nikoufard, M., Vries, de, T., Oei, Y. S., Di Cioccio, L., Fédéli, J-M., Lagahe, C., Orobtchouk, R., Seassal, C., Van Campenhout, J., Thourhout, Van, D., Veldhoven, van, P. J., Nötzel, R., & Smit, M. K. (2007). InP-based membrane photodetector for optical interconnections on CMOS ICs. In P. Emplit, M. Delqué, S. P. Gorza, P. Kockaert, & X. J. M. Leijtens (Eds.), Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium (pp. 83-86). IEEE/LEOS.

Binetti, P.R.A. ; Leijtens, X.J.M. ; La Porta, Antonio et al. / InP-based membrane photodetector for optical interconnections on CMOS ICs. Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium. editor / Ph. Emplit ; M. Delqué ; S.P. Gorza ; P. Kockaert ; X.J.M. Leijtens. Brussels : IEEE/LEOS, 2007. pp. 83-86

@inproceedings{2b33ebacbb9447c9be591f81ea50bcc1,

title = "InP-based membrane photodetector for optical interconnections on CMOS ICs",

abstract = "We demonstrate a compact photodetector suitable for photonic interconnections on electronic ICs. In such applications, the InP-based optical sources and detectors are linked via Si photonic waveguides in an interconnection layer on top of the CMOS circuitry. The photonic device processing is compatible with Si wafer scale fabrication steps, which guarantees compatibility with future IC manufacturing. In our approach, an InP membrane waveguide is used to couple the light out of the interconnection layer and carry it towards the detector absorption region. A responsivity of 0.45 A/W and an electrical frequency response 3-dB cut-off point at 15 GHz were measured.",

author = "P.R.A. Binetti and X.J.M. Leijtens and {La Porta}, Antonio and M. Nikoufard and {Vries, de}, T. and Y.S. Oei and {Di Cioccio}, L. and J.-M. F{\'e}d{\'e}li and C. Lagahe and R. Orobtchouk and C. Seassal and {Van Campenhout}, J. and {Thourhout, Van}, D. and {Veldhoven, van}, P.J. and R. N{\"o}tzel and M.K. Smit",

year = "2007",

language = "English",

isbn = "978-2-9600753-0-4",

pages = "83--86",

editor = "Ph. Emplit and M. Delqu{\'e} and S.P. Gorza and P. Kockaert and X.J.M. Leijtens",

booktitle = "Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium",

publisher = "IEEE/LEOS",

note = "12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium ; Conference date: 17-12-2007 Through 18-12-2007",

}

Binetti, PRA, Leijtens, XJM, La Porta, A, Nikoufard, M, Vries, de, T, Oei, YS, Di Cioccio, L, Fédéli, J-M, Lagahe, C, Orobtchouk, R, Seassal, C, Van Campenhout, J, Thourhout, Van, D, Veldhoven, van, PJ, Nötzel, R & Smit, MK 2007, InP-based membrane photodetector for optical interconnections on CMOS ICs. in P Emplit, M Delqué, SP Gorza, P Kockaert & XJM Leijtens (eds), Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium. IEEE/LEOS, Brussels, pp. 83-86, 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium, Brussels, Belgium, 17/12/07.

InP-based membrane photodetector for optical interconnections on CMOS ICs. / Binetti, P.R.A.; Leijtens, X.J.M.; La Porta, Antonio et al.
Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium. ed. / Ph. Emplit; M. Delqué; S.P. Gorza; P. Kockaert; X.J.M. Leijtens. Brussels: IEEE/LEOS, 2007. p. 83-86.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - InP-based membrane photodetector for optical interconnections on CMOS ICs

AU - Binetti, P.R.A.

AU - Leijtens, X.J.M.

AU - La Porta, Antonio

AU - Nikoufard, M.

AU - Vries, de, T.

AU - Oei, Y.S.

AU - Di Cioccio, L.

AU - Fédéli, J.-M.

AU - Lagahe, C.

AU - Orobtchouk, R.

AU - Seassal, C.

AU - Van Campenhout, J.

AU - Thourhout, Van, D.

AU - Veldhoven, van, P.J.

AU - Nötzel, R.

AU - Smit, M.K.

PY - 2007

Y1 - 2007

N2 - We demonstrate a compact photodetector suitable for photonic interconnections on electronic ICs. In such applications, the InP-based optical sources and detectors are linked via Si photonic waveguides in an interconnection layer on top of the CMOS circuitry. The photonic device processing is compatible with Si wafer scale fabrication steps, which guarantees compatibility with future IC manufacturing. In our approach, an InP membrane waveguide is used to couple the light out of the interconnection layer and carry it towards the detector absorption region. A responsivity of 0.45 A/W and an electrical frequency response 3-dB cut-off point at 15 GHz were measured.

AB - We demonstrate a compact photodetector suitable for photonic interconnections on electronic ICs. In such applications, the InP-based optical sources and detectors are linked via Si photonic waveguides in an interconnection layer on top of the CMOS circuitry. The photonic device processing is compatible with Si wafer scale fabrication steps, which guarantees compatibility with future IC manufacturing. In our approach, an InP membrane waveguide is used to couple the light out of the interconnection layer and carry it towards the detector absorption region. A responsivity of 0.45 A/W and an electrical frequency response 3-dB cut-off point at 15 GHz were measured.

M3 - Conference contribution

SN - 978-2-9600753-0-4

SP - 83

EP - 86

BT - Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium

A2 - Emplit, Ph.

A2 - Delqué, M.

A2 - Gorza, S.P.

A2 - Kockaert, P.

A2 - Leijtens, X.J.M.

PB - IEEE/LEOS

CY - Brussels

T2 - 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, December 17-18, 2007, Brussels, Belgium

Y2 - 17 December 2007 through 18 December 2007

ER -

Binetti PRA, Leijtens XJM, La Porta A, Nikoufard M, Vries, de T, Oei YS et al. InP-based membrane photodetector for optical interconnections on CMOS ICs. In Emplit P, Delqué M, Gorza SP, Kockaert P, Leijtens XJM, editors, Proceedings of the 12th Annual Symposium of the IEEE/LEOS Benelux Chapter, 17-18 December 2007, Brussels, Belgium. Brussels: IEEE/LEOS. 2007. p. 83-86

InP-based membrane photodetector for optical interconnections on CMOS ICs

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