Abstract
We present the design, fabrication, and characterization
of a membrane coupler processed on an indium phosphide
membrane layer on a silicon-on-insulator wafer, that is used for
applications in optical interconnects on silicon. Measured coupler
efficiency is 50%. The photonic device fabrication is compatible
with wafer scale processing steps, guaranteeing compatibility towards
future generation electronic integrated circuit processing.
Original language | English |
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Pages (from-to) | 337-339 |
Number of pages | 3 |
Journal | IEEE Photonics Technology Letters |
Volume | 21 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2009 |