InP-based membrane couplers for optical interconnects on Si

P.R.A. Binetti, R. Orobtchouk, X.J.M. Leijtens, B. Han, T. Vries, de, Y.S. Oei, L. Di Cioccio, J.-M. Fédéli, C. Lagahe, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

Research output: Contribution to journalArticleAcademicpeer-review

8 Citations (Scopus)
1 Downloads (Pure)

Abstract

We present the design, fabrication, and characterization of a membrane coupler processed on an indium phosphide membrane layer on a silicon-on-insulator wafer, that is used for applications in optical interconnects on silicon. Measured coupler efficiency is 50%. The photonic device fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic integrated circuit processing.
Original languageEnglish
Pages (from-to)337-339
Number of pages3
JournalIEEE Photonics Technology Letters
Volume21
Issue number5
DOIs
Publication statusPublished - 2009

Fingerprint

Dive into the research topics of 'InP-based membrane couplers for optical interconnects on Si'. Together they form a unique fingerprint.

Cite this