InP-based membrane couplers for optical interconnects on Si

P.R.A. Binetti; R. Orobtchouk; X.J.M. Leijtens; B. Han; T. Vries, de; Y.S. Oei; L. Di Cioccio; J.-M. Fédéli; C. Lagahe; P.J. Veldhoven, van; R. Nötzel; M.K. Smit

doi:10.1109/LPT.2008.2011649

InP-based membrane couplers for optical interconnects on Si

P.R.A. Binetti, R. Orobtchouk, X.J.M. Leijtens, B. Han, T. Vries, de, Y.S. Oei, L. Di Cioccio, J.-M. Fédéli, C. Lagahe, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

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Abstract

We present the design, fabrication, and characterization of a membrane coupler processed on an indium phosphide membrane layer on a silicon-on-insulator wafer, that is used for applications in optical interconnects on silicon. Measured coupler efficiency is 50%. The photonic device fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic integrated circuit processing.

Original language	English
Pages (from-to)	337-339
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	21
Issue number	5
DOIs	https://doi.org/10.1109/LPT.2008.2011649
Publication status	Published - 2009

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title = "InP-based membrane couplers for optical interconnects on Si",

abstract = "We present the design, fabrication, and characterization of a membrane coupler processed on an indium phosphide membrane layer on a silicon-on-insulator wafer, that is used for applications in optical interconnects on silicon. Measured coupler efficiency is 50%. The photonic device fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic integrated circuit processing.",

author = "P.R.A. Binetti and R. Orobtchouk and X.J.M. Leijtens and B. Han and {Vries, de}, T. and Y.S. Oei and {Di Cioccio}, L. and J.-M. F{\'e}d{\'e}li and C. Lagahe and {Veldhoven, van}, P.J. and R. N{\"o}tzel and M.K. Smit",

year = "2009",

doi = "10.1109/LPT.2008.2011649",

language = "English",

volume = "21",

pages = "337--339",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers",

number = "5",

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TY - JOUR

T1 - InP-based membrane couplers for optical interconnects on Si

AU - Binetti, P.R.A.

AU - Orobtchouk, R.

AU - Leijtens, X.J.M.

AU - Han, B.

AU - Vries, de, T.

AU - Oei, Y.S.

AU - Di Cioccio, L.

AU - Fédéli, J.-M.

AU - Lagahe, C.

AU - Veldhoven, van, P.J.

AU - Nötzel, R.

AU - Smit, M.K.

PY - 2009

Y1 - 2009

N2 - We present the design, fabrication, and characterization of a membrane coupler processed on an indium phosphide membrane layer on a silicon-on-insulator wafer, that is used for applications in optical interconnects on silicon. Measured coupler efficiency is 50%. The photonic device fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic integrated circuit processing.

AB - We present the design, fabrication, and characterization of a membrane coupler processed on an indium phosphide membrane layer on a silicon-on-insulator wafer, that is used for applications in optical interconnects on silicon. Measured coupler efficiency is 50%. The photonic device fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic integrated circuit processing.

U2 - 10.1109/LPT.2008.2011649

DO - 10.1109/LPT.2008.2011649

M3 - Article

VL - 21

SP - 337

EP - 339

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

SN - 1041-1135

IS - 5

ER -

InP-based membrane couplers for optical interconnects on Si

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