Innovation and synergy in thin film deposition: from plasma-based chemical vapor deposition to atomic and molecular layer deposition

Morteza Aghaee

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Applied Physics
Supervisors/Advisors
  • Creatore, M. (Adriana), Promotor
  • Kessels, W.M.M. (Erwin), Promotor
Award date24 Jun 2019
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4794-4
Publication statusPublished - 24 Jun 2019

Bibliographical note

Proefschrift.

Promotion : time and place

  • 13.30h, Atlas, room 0.710

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