Innovation and synergy in thin film deposition: from plasma-based chemical vapor deposition to atomic and molecular layer deposition

Morteza Aghaee

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Creatore, M. (Adriana), Promotor Kessels, W.M.M. (Erwin), Promotor
Award date	24 Jun 2019
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-4794-4
Publication status	Published - 24 Jun 2019

Proefschrift.

Promotion : time and place

@phdthesis{2b29cb8b7fbf4eb89a13cc6b6234ece9,

title = "Innovation and synergy in thin film deposition: from plasma-based chemical vapor deposition to atomic and molecular layer deposition",

author = "Morteza Aghaee",

note = "Proefschrift.",

year = "2019",

month = jun,

day = "24",

language = "English",

isbn = "978-90-386-4794-4",

publisher = "Technische Universiteit Eindhoven",

school = "Applied Physics and Science Education",

}