Infrared spectroscopy of plasma and surface

G.M.W. Kroesen, M. Haverlag, E. Stoffels-Adamowicz, W.W. Stoffels, J.H.W.G. Boer, den, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationProceedings 9th international colloquium on plasma processes, June 6-11, 1993, Antibes, Juan-les-Pins, France
Place of PublicationParis
PublisherSociété Française du Vide
Pages1-8
Publication statusPublished - 1993

Publication series

NameLe vide, les couches minces
Volumesuppl. 266

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