Infrared and optical emission spectroscopy study of the surface chemistry in atmospheric-pressure plasma-enhanced spatial ALD of Al2O3

Research output: Contribution to journalArticleAcademicpeer-review

Fingerprint Dive into the research topics of 'Infrared and optical emission spectroscopy study of the surface chemistry in atmospheric-pressure plasma-enhanced spatial ALD of Al2O3'. Together they form a unique fingerprint.

Engineering & Materials Science