Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma

A. Milella, M. Creatore, M.A. Blauw, M.C.M. Sanden, van de

Research output: Contribution to conferencePoster

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Abstract

No abstract
Original languageEnglish
PagesB 5-
Publication statusPublished - 2006
Event18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands - Lunteren, Netherlands
Duration: 22 Mar 200623 Mar 2006

Conference

Conference18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands
CountryNetherlands
CityLunteren
Period22/03/0623/03/06

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Bibliographical note

18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

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Milella, A., Creatore, M., Blauw, M. A., & Sanden, van de, M. C. M. (2006). Influence of the ion bombardment on the growth and moisture permeation barrier properties of SiO2-like films deposited by remote plasma. B 5-. Poster session presented at 18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands, Lunteren, Netherlands.