Influence of spare parts service measures on the performance of front-end wafer production process

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Abstract

We are interested in the influence of spare part service measures on the performance of front-end wafer fabrication process. This process is characterized by re-entrant flows exacerbating variability differences. We focus on the bottleneck resource. First, we simulate the spare part supply chain to show the impact of the spare part service measures on the time to repair distribution. Second, we use this distribution to assess the performance of the front-end wafer fabrication process. We conclude that the choice of the spare parts service measure has a high impact on the front-end wafer fabrication process performance. Our methodology could help practitioners making improved decisions regarding spare parts service measure.
Original languageEnglish
Title of host publication2019 Winter Simulation Conference (WSC 2019)
PublisherInstitute of Electrical and Electronics Engineers
Pages2269-2280
Number of pages12
ISBN (Electronic)9781728132839
DOIs
Publication statusPublished - Dec 2019
Event2019 Winter Simulation Conference (WSC 2019) - National Harbor, MD, USA, National Harbor, United States
Duration: 8 Dec 201911 Dec 2019
http://meetings2.informs.org/wordpress/wsc2019/

Conference

Conference2019 Winter Simulation Conference (WSC 2019)
Abbreviated titleWSC2019
CountryUnited States
CityNational Harbor
Period8/12/1911/12/19
Internet address

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Cite this

Lamghari-Idrissi, D., Soellaart, D. H., Basten, R. J. I., & Dellaert, N. P. (2019). Influence of spare parts service measures on the performance of front-end wafer production process. In 2019 Winter Simulation Conference (WSC 2019) (pp. 2269-2280). [9004919] Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/WSC40007.2019.9004919