Influence of source parameters on the fast ionic debris emission of a Sn-based EUV emitting discharge plasma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands
Publication status	Published - 2008

Cite this

@inproceedings{356aa6cb3b324b0bb5254d51d07e81ea,

title = "Influence of source parameters on the fast ionic debris emission of a Sn-based EUV emitting discharge plasma",

author = "K. Gielissen and Y. Sidelnikov and W.J. Soer and \{Herpen, van\}, M.W. and D. Glushkov and V.Y. Banine and \{Mullen, van der\}, J.J.A.M.",

year = "2008",

language = "English",

booktitle = "Proceedings of the 20st Symposium Plasma Physics \& Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands",

}

Influence of source parameters on the fast ionic debris emission of a Sn-based EUV emitting discharge plasma. / Gielissen, K.; Sidelnikov, Y.; Soer, W.J. et al.
Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands. 2008.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Influence of source parameters on the fast ionic debris emission of a Sn-based EUV emitting discharge plasma

AU - Gielissen, K.

AU - Sidelnikov, Y.

AU - Soer, W.J.

AU - Herpen, van, M.W.

AU - Glushkov, D.

AU - Banine, V.Y.

AU - Mullen, van der, J.J.A.M.

PY - 2008

Y1 - 2008

M3 - Conference contribution

BT - Proceedings of the 20st Symposium Plasma Physics & Radiation Technology 2008, 4-5 March 2008, Lunteren, The Netherlands

ER -