Inferential control of a wafer stage using disturbance observers

N.F.M. Mooren, N.J. Dirkx, R.J. Voorhoeve, Tom Oomen

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Abstract

In high-precision motion systems it is often not possible to directly measure at the location where performance is required. Therefore, performance variables need to be inferred from non-collocated sensor measurements. If flexible behavior is negligible, a static sensor transformation is used to find a rigid-body (RB) approximation of the performance variable. However, for next-generation motion systems positioning accuracy is ever-increasing, leading to a situation where flexible dynamics are not negligible. As a result, traditional single degree-of-freedom (DOF) controllers are inadequate [1]. The aim of this research is to control the unmeasured performance variable while taking flexible behavior into account, through 2-DOF controller structures and disturbance observers.
Original languageEnglish
Pages138
Number of pages1
Publication statusPublished - 15 Mar 2018
Event37th Benelux Meeting on Systems and Control - Kontakt der Kontinenten, Soesterberg, Netherlands
Duration: 27 Mar 201829 Mar 2018
http://www.beneluxmeeting.nl/2018/

Conference

Conference37th Benelux Meeting on Systems and Control
CountryNetherlands
CitySoesterberg
Period27/03/1829/03/18
Internet address

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