Industrial application of atom probe tomography to semiconductor devices

A.D. Giddings; S. Koelling; Y. Shimizu; R. Estivill; K. Inoue; W. Vandervorst; W.K. Yeoh

doi:10.1016/j.scriptamat.2017.09.004

Industrial application of atom probe tomography to semiconductor devices

A.D. Giddings, S. Koelling, Y. Shimizu, R. Estivill, K. Inoue, W. Vandervorst, W.K. Yeoh

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

Advanced semiconductor devices offer a metrology challenge due to their small feature size, diverse composition and intricate structure. Atom probe tomography (APT) is an emerging technique that provides 3D compositional analysis at the atomic-scale; as such, it seems uniquely suited to meet these challenges. However, the semiconductor industry has demanding requirements against which the techniques in use are evaluated. This article explores the use of APT in the semiconductor industry, showing the potential of the technique, the obstacles that occur in practise, and possible future developments.

Original language	English
Pages (from-to)	82-90
Number of pages	9
Journal	Scripta Materialia
Volume	148
DOIs	https://doi.org/10.1016/j.scriptamat.2017.09.004
Publication status	Published - 15 Apr 2018

Funding

Y.S. is grateful to JSPS KAKENHI grant nos. 24760246 , 26289097 , and 15H05413 . R.E. is grateful to ANRT for grant CIFRE 2012/0679 .

Keywords

3D Metrology
Atom probe tomography
Dopant engineering
Failure analysis
Semiconductor devices

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10.1016/j.scriptamat.2017.09.004

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title = "Industrial application of atom probe tomography to semiconductor devices",

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AU - Giddings, A.D.

AU - Koelling, S.

AU - Shimizu, Y.

AU - Estivill, R.

AU - Inoue, K.

AU - Vandervorst, W.

AU - Yeoh, W.K.

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AB - Advanced semiconductor devices offer a metrology challenge due to their small feature size, diverse composition and intricate structure. Atom probe tomography (APT) is an emerging technique that provides 3D compositional analysis at the atomic-scale; as such, it seems uniquely suited to meet these challenges. However, the semiconductor industry has demanding requirements against which the techniques in use are evaluated. This article explores the use of APT in the semiconductor industry, showing the potential of the technique, the obstacles that occur in practise, and possible future developments.

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KW - Atom probe tomography

KW - Dopant engineering

KW - Failure analysis

KW - Semiconductor devices

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VL - 148

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JO - Scripta Materialia

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ER -

Industrial application of atom probe tomography to semiconductor devices

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Keywords

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