Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2

C.F.V. Carlstrom; R. Heijden, van der; A.A.M. Kok; R.W. Heijden, van der; F. Karouta; J.J.G.M. Tol, van der; R. Nötzel; P.J. Veldhoven, van; H.W.M. Salemink

Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2

C.F.V. Carlstrom, R. Heijden, van der, A.A.M. Kok, R.W. Heijden, van der, F. Karouta, J.J.G.M. Tol, van der, R. Nötzel, P.J. Veldhoven, van, H.W.M. Salemink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 17th International Conference on Indium Phosphide and Related Materials (IPRM), 8-12 May 2005, Glasgow, Schotland
Place of Publication	Glasgow, Scotland
Pages	114-117
Publication status	Published - 2005
Event	conference; 17th IPRM; 2005-05-08; 2005-05-12 - Duration: 8 May 2005 → 12 May 2005

Conference

Conference	conference; 17th IPRM; 2005-05-08; 2005-05-12
Period	8/05/05 → 12/05/05
Other	17th IPRM

Cite this

Carlstrom, C. F. V., Heijden, van der, R., Kok, A. A. M., Heijden, van der, R. W., Karouta, F., Tol, van der, J. J. G. M., Nötzel, R., Veldhoven, van, P. J., & Salemink, H. W. M. (2005). Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2. In Proceedings of the 17th International Conference on Indium Phosphide and Related Materials (IPRM), 8-12 May 2005, Glasgow, Schotland (pp. 114-117).

@inproceedings{47a17dcdfd64402da1897ad92f78aa34,

title = "Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2",

author = "C.F.V. Carlstrom and {Heijden, van der}, R. and A.A.M. Kok and {Heijden, van der}, R.W. and F. Karouta and {Tol, van der}, J.J.G.M. and R. N{\"o}tzel and {Veldhoven, van}, P.J. and H.W.M. Salemink",

year = "2005",

language = "English",

isbn = "0-7803-8892-5",

pages = "114--117",

booktitle = "Proceedings of the 17th International Conference on Indium Phosphide and Related Materials (IPRM), 8-12 May 2005, Glasgow, Schotland",

note = "conference; 17th IPRM; 2005-05-08; 2005-05-12 ; Conference date: 08-05-2005 Through 12-05-2005",

}

Carlstrom, CFV, Heijden, van der, R, Kok, AAM, Heijden, van der, RW, Karouta, F, Tol, van der, JJGM, Nötzel, R, Veldhoven, van, PJ & Salemink, HWM 2005, Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2. in Proceedings of the 17th International Conference on Indium Phosphide and Related Materials (IPRM), 8-12 May 2005, Glasgow, Schotland. Glasgow, Scotland, pp. 114-117, conference; 17th IPRM; 2005-05-08; 2005-05-12, 8/05/05.

Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2. / Carlstrom, C.F.V.; Heijden, van der, R.; Kok, A.A.M. et al.
Proceedings of the 17th International Conference on Indium Phosphide and Related Materials (IPRM), 8-12 May 2005, Glasgow, Schotland. Glasgow, Scotland, 2005. p. 114-117.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2

AU - Carlstrom, C.F.V.

AU - Heijden, van der, R.

AU - Kok, A.A.M.

AU - Heijden, van der, R.W.

AU - Karouta, F.

AU - Tol, van der, J.J.G.M.

AU - Nötzel, R.

AU - Veldhoven, van, P.J.

AU - Salemink, H.W.M.

PY - 2005

Y1 - 2005

M3 - Conference contribution

SN - 0-7803-8892-5

SP - 114

EP - 117

BT - Proceedings of the 17th International Conference on Indium Phosphide and Related Materials (IPRM), 8-12 May 2005, Glasgow, Schotland

CY - Glasgow, Scotland

T2 - conference; 17th IPRM; 2005-05-08; 2005-05-12

Y2 - 8 May 2005 through 12 May 2005

ER -