Inductively coupled plasma etching of deep photonic crystal holes in InP using CI2

C.F.V. Carlstrom, R. Heijden, van der, A.A.M. Kok, R.W. Heijden, van der, F. Karouta, J.J.G.M. Tol, van der, R. Nötzel, P.J. Veldhoven, van, H.W.M. Salemink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference on Indium Phosphide and Related Materials (IPRM), 8-12 May 2005, Glasgow, Schotland
Place of PublicationGlasgow, Scotland
Publication statusPublished - 2005
Eventconference; 17th IPRM; 2005-05-08; 2005-05-12 -
Duration: 8 May 200512 May 2005


Conferenceconference; 17th IPRM; 2005-05-08; 2005-05-12
Other17th IPRM

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