Indium phosphide based membrane photodetector for optical interconnects on silicon

P.R.A. Binetti, X.J.M. Leijtens, T. Vries, de, Y.S. Oei, O. Raz, L. Di Cioccio, J.-M. Fédéli, C. Lagahe, R. Orobtchouk, J. Van Campenhout, D. Thourhout, Van, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
142 Downloads (Pure)


We have designed, fabricated and characterized an InP-based membrane photodetector on an SOI wafer containing a Si-wiring photonic circuit. New results on RF characterization up to 20 GHz are presented. The detector fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic IC processing.
Original languageEnglish
Title of host publicationProceedings of the 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society (LEOS 2008), 9-13 November 2008, Newport Beach, California USA
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
ISBN (Print)978-1-4244-1931-9
Publication statusPublished - 2008


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