Incident ion energies spectra from an RF plasma in CF4

T.H.J. Bisschops, P.M. Vallinga, Daan Schram, F.J. de Hoog

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationSASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23
EditorsA. Pesnelle
Place of PublicationGif-sur-Yvette
PublisherService de physique des atomes et des surfaces, CEN Saclay
Pages373-378
ISBN (Print)2727201362
Publication statusPublished - 1988
Event1988 Symposium on Atomic and Surface Physics (SASP '88) - La Plagne, France
Duration: 17 Jan 198823 Jan 1988

Conference

Conference1988 Symposium on Atomic and Surface Physics (SASP '88)
CountryFrance
CityLa Plagne
Period17/01/8823/01/88

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