@inproceedings{93e69c565e9c41bdb2a25d445f88059a,
title = "Incident ion energies spectra from an RF plasma in CF4",
author = "T.H.J. Bisschops and P.M. Vallinga and Daan Schram and {de Hoog}, F.J.",
year = "1988",
language = "English",
isbn = "2727201362",
pages = "373--378",
editor = "A. Pesnelle",
booktitle = "SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23",
publisher = "Service de physique des atomes et des surfaces, CEN Saclay",
note = "1988 Symposium on Atomic and Surface Physics (SASP '88) ; Conference date: 17-01-1988 Through 23-01-1988",
}