Incident ion energies spectra from an RF plasma in CF4

T.H.J. Bisschops, P.M. Vallinga, Daan Schram, F.J. de Hoog

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationSASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23
EditorsA. Pesnelle
Place of PublicationGif-sur-Yvette
PublisherService de physique des atomes et des surfaces, CEN Saclay
Pages373-378
ISBN (Print)2727201362
Publication statusPublished - 1988
Event1988 Symposium on Atomic and Surface Physics (SASP '88) - La Plagne, France
Duration: 17 Jan 198823 Jan 1988

Conference

Conference1988 Symposium on Atomic and Surface Physics (SASP '88)
CountryFrance
CityLa Plagne
Period17/01/8823/01/88

Cite this

Bisschops, T. H. J., Vallinga, P. M., Schram, D., & de Hoog, F. J. (1988). Incident ion energies spectra from an RF plasma in CF4. In A. Pesnelle (Ed.), SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23 (pp. 373-378). Gif-sur-Yvette: Service de physique des atomes et des surfaces, CEN Saclay.
Bisschops, T.H.J. ; Vallinga, P.M. ; Schram, Daan ; de Hoog, F.J. / Incident ion energies spectra from an RF plasma in CF4. SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23. editor / A. Pesnelle. Gif-sur-Yvette : Service de physique des atomes et des surfaces, CEN Saclay, 1988. pp. 373-378
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title = "Incident ion energies spectra from an RF plasma in CF4",
author = "T.H.J. Bisschops and P.M. Vallinga and Daan Schram and {de Hoog}, F.J.",
year = "1988",
language = "English",
isbn = "2727201362",
pages = "373--378",
editor = "A. Pesnelle",
booktitle = "SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23",
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Bisschops, THJ, Vallinga, PM, Schram, D & de Hoog, FJ 1988, Incident ion energies spectra from an RF plasma in CF4. in A Pesnelle (ed.), SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23. Service de physique des atomes et des surfaces, CEN Saclay, Gif-sur-Yvette, pp. 373-378, 1988 Symposium on Atomic and Surface Physics (SASP '88), La Plagne, France, 17/01/88.

Incident ion energies spectra from an RF plasma in CF4. / Bisschops, T.H.J.; Vallinga, P.M.; Schram, Daan; de Hoog, F.J.

SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23. ed. / A. Pesnelle. Gif-sur-Yvette : Service de physique des atomes et des surfaces, CEN Saclay, 1988. p. 373-378.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Incident ion energies spectra from an RF plasma in CF4

AU - Bisschops, T.H.J.

AU - Vallinga, P.M.

AU - Schram, Daan

AU - de Hoog, F.J.

PY - 1988

Y1 - 1988

M3 - Conference contribution

SN - 2727201362

SP - 373

EP - 378

BT - SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23

A2 - Pesnelle, A.

PB - Service de physique des atomes et des surfaces, CEN Saclay

CY - Gif-sur-Yvette

ER -

Bisschops THJ, Vallinga PM, Schram D, de Hoog FJ. Incident ion energies spectra from an RF plasma in CF4. In Pesnelle A, editor, SASP, Symposium on Atomic and Surface Physics, '88 : contributions : La Plagne, France, January 17-23. Gif-sur-Yvette: Service de physique des atomes et des surfaces, CEN Saclay. 1988. p. 373-378