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In situ transmission electron microscopy analysis of electron beam induced crystallization of amorphous marks in phase-change materials

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Abstract

The crystallization of melt-quenched amorphous data marks in a crystalline (Ga15Sb85) phase-change layer from rewritable disks by transmission electron microscopy was discussed. Electron irradiation induced crystallization was obtained at room temperature by using a 120 kV. A comparison with laser-crystallized amorphous marks was made. An electron beam (e - beam) induced crystallization started from the amorphous crystalline interface. A dependence of growth velocity on e- beam intensity and growth direction was observed.

Original languageEnglish
Pages (from-to)3193-3198
Number of pages6
JournalJournal of Applied Physics
Volume96
Issue number6
DOIs
Publication statusPublished - 15 Sept 2004
Externally publishedYes

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