In situ surface analysis by low energy ion scattering

A.W. Denier van der Gon; H.M.R. Cortenraad; W.P.A. Jansen; M.A. Reijme; H.H. Brongersma

doi:10.1016/S0168-583X(99)00673-4

In situ surface analysis by low energy ion scattering

A.W. Denier van der Gon, H.M.R. Cortenraad, W.P.A. Jansen, M.A. Reijme, H.H. Brongersma

Applied Physics and Science Education

Research output: Contribution to journal › Article › Academic › peer-review

9 Citations (Scopus)

Abstract

We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis of devices and functional materials. First we discuss the limitations imposed by the technique such as pressure and spatial resolution. Next, we present a new method to suppress backgrounds in LEIS spectra due to the presence of light elements by using a combined electrostatic and flight-time analysis. Examples of in situ analysis on thermionic cathodes are presented which shed light on the surface structure and composition of these cathodes, and also allow us to study the resistivity of such cathodes to ion bombardement. Finally, a design is presented for a pressure cell for in situ surface analysis of catalysts during catalytic reaction.

Original language	English
Pages (from-to)	56-64
Number of pages	9
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	161-163
DOIs	https://doi.org/10.1016/S0168-583X(99)00673-4
Publication status	Published - 2000

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title = "In situ surface analysis by low energy ion scattering",

abstract = "We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis of devices and functional materials. First we discuss the limitations imposed by the technique such as pressure and spatial resolution. Next, we present a new method to suppress backgrounds in LEIS spectra due to the presence of light elements by using a combined electrostatic and flight-time analysis. Examples of in situ analysis on thermionic cathodes are presented which shed light on the surface structure and composition of these cathodes, and also allow us to study the resistivity of such cathodes to ion bombardement. Finally, a design is presented for a pressure cell for in situ surface analysis of catalysts during catalytic reaction.",

author = "{Denier van der Gon}, A.W. and H.M.R. Cortenraad and W.P.A. Jansen and M.A. Reijme and H.H. Brongersma",

year = "2000",

doi = "10.1016/S0168-583X(99)00673-4",

language = "English",

volume = "161-163",

pages = "56--64",

journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - In situ surface analysis by low energy ion scattering

AU - Denier van der Gon, A.W.

AU - Cortenraad, H.M.R.

AU - Jansen, W.P.A.

AU - Reijme, M.A.

AU - Brongersma, H.H.

PY - 2000

Y1 - 2000

N2 - We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis of devices and functional materials. First we discuss the limitations imposed by the technique such as pressure and spatial resolution. Next, we present a new method to suppress backgrounds in LEIS spectra due to the presence of light elements by using a combined electrostatic and flight-time analysis. Examples of in situ analysis on thermionic cathodes are presented which shed light on the surface structure and composition of these cathodes, and also allow us to study the resistivity of such cathodes to ion bombardement. Finally, a design is presented for a pressure cell for in situ surface analysis of catalysts during catalytic reaction.

AB - We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis of devices and functional materials. First we discuss the limitations imposed by the technique such as pressure and spatial resolution. Next, we present a new method to suppress backgrounds in LEIS spectra due to the presence of light elements by using a combined electrostatic and flight-time analysis. Examples of in situ analysis on thermionic cathodes are presented which shed light on the surface structure and composition of these cathodes, and also allow us to study the resistivity of such cathodes to ion bombardement. Finally, a design is presented for a pressure cell for in situ surface analysis of catalysts during catalytic reaction.

U2 - 10.1016/S0168-583X(99)00673-4

DO - 10.1016/S0168-583X(99)00673-4

M3 - Article

SN - 0168-583X

VL - 161-163

SP - 56

EP - 64

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

ER -

In situ surface analysis by low energy ion scattering

Abstract

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