In situ studies of surface reactions during atomic layer deposition of Al2O3 and Pt films

Research output: Contribution to conference › Other › Academic

Abstract

No abstract.

Original language	English
Number of pages	27
Publication status	Published - 2009
Event	Gordon Research Conference: Chemical Reactions at Surfaces 2009 - Ventura Beach Marriott, Ventura, United States Duration: 8 Feb 2009 → 13 Feb 2009

@conference{763ec05ed75d4cf1aa15d991a69a89f3,

title = "In situ studies of surface reactions during atomic layer deposition of Al2O3 and Pt films",

abstract = "No abstract.",

author = "W.M.M. Kessels",

year = "2009",

language = "English",

note = "Gordon Research Conference : Chemical Reactions at Surfaces 2009 ; Conference date: 08-02-2009 Through 13-02-2009",

}