In situ studies of surface reactions during atomic layer deposition of Al2O3 and Pt films

Research output: Contribution to conferenceOther

Abstract

No abstract.
Original languageEnglish
Number of pages27
Publication statusPublished - 2009
EventGordon Research Conference "Chemical Reactions at Surfaces", February 8-13, 2009, Ventura, CA, USA - Ventura, CA, United States
Duration: 1 Feb 20091 Feb 2009

Conference

ConferenceGordon Research Conference "Chemical Reactions at Surfaces", February 8-13, 2009, Ventura, CA, USA
Country/TerritoryUnited States
CityVentura, CA
Period1/02/091/02/09

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