In situ spectroscopic ellipsometry during amorphous carbon deposition

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands
Editors	M. Graef, de, G. Zegers, E. Min, F. Pavert, van de
Place of Publication	Utrecht
Publisher	FOM: Stichting Fundamenteel onderzoek der Materie
Pages	P05.66-204
Publication status	Published - 2010

Cite this

@inproceedings{bc43a757b29540a1b99b0c34c979e386,

title = "In situ spectroscopic ellipsometry during amorphous carbon deposition",

author = "T.A.R. Hansen and J.W. Weber and \{Sanden, van de\}, M.C.M. and R.A.H. Engeln",

year = "2010",

language = "English",

pages = "P05.66--204",

editor = "\{Graef, de\}, M. and G. Zegers and E. Min and \{Pavert, van de\}, F.",

booktitle = "Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands",

publisher = "FOM: Stichting Fundamenteel onderzoek der Materie",

}

In situ spectroscopic ellipsometry during amorphous carbon deposition. / Hansen, T.A.R.; Weber, J.W.; Sanden, van de, M.C.M. et al.
Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands. ed. / M. Graef, de; G. Zegers; E. Min; F. Pavert, van de. Utrecht: FOM: Stichting Fundamenteel onderzoek der Materie, 2010. p. P05.66-204.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - In situ spectroscopic ellipsometry during amorphous carbon deposition

AU - Hansen, T.A.R.

AU - Weber, J.W.

AU - Sanden, van de, M.C.M.

AU - Engeln, R.A.H.

PY - 2010

Y1 - 2010

M3 - Conference contribution

SP - P05.66-204

BT - Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands

A2 - Graef, de, M.

A2 - Zegers, G.

A2 - Min, E.

A2 - Pavert, van de, F.

PB - FOM: Stichting Fundamenteel onderzoek der Materie

CY - Utrecht

ER -