In situ spectroscopic ellipsometry during amorphous carbon deposition

T.A.R. Hansen, J.W. Weber, M.C.M. Sanden, van de, R.A.H. Engeln

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)
Original languageEnglish
Title of host publicationPhysics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands
EditorsM. Graef, de, G. Zegers, E. Min, F. Pavert, van de
Place of PublicationUtrecht
PublisherStichting FOM
PagesP05.66-204
Publication statusPublished - 2010

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