In situ spectroscopic ellipsometry during amorphous carbon deposition

T.A.R. Hansen, J.W. Weber, M.C.M. Sanden, van de, R.A.H. Engeln

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

1 Citation (Scopus)
Original languageEnglish
Title of host publicationPhysics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands
EditorsM. Graef, de, G. Zegers, E. Min, F. Pavert, van de
Place of PublicationUtrecht
PublisherStichting FOM
PagesP05.66-204
Publication statusPublished - 2010

Cite this

Hansen, T. A. R., Weber, J. W., Sanden, van de, M. C. M., & Engeln, R. A. H. (2010). In situ spectroscopic ellipsometry during amorphous carbon deposition. In M. Graef, de, G. Zegers, E. Min, & F. Pavert, van de (Eds.), Physics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands (pp. P05.66-204). Stichting FOM.