In situ plasma and film growth studies during PECVD

Research output: Contribution to conferenceOtherAcademic

Conference

Conferenceconference; Tokyo University; 2004-04-01; 2004-04-01
Period1/04/041/04/04
OtherTokyo University

Cite this

Sanden, van de, M. C. M. (2010). In situ plasma and film growth studies during PECVD. conference; Tokyo University; 2004-04-01; 2004-04-01, .
Sanden, van de, M.C.M./ In situ plasma and film growth studies during PECVD. conference; Tokyo University; 2004-04-01; 2004-04-01, .
@conference{ad91a14a593c4c2787fd2eae989fb873,
title = "In situ plasma and film growth studies during PECVD",
author = "{Sanden, van de}, M.C.M.",
year = "2010",
language = "English",
note = "conference; Tokyo University; 2004-04-01; 2004-04-01 ; Conference date: 01-04-2004 Through 01-04-2004",

}

Sanden, van de, MCM 2010, 'In situ plasma and film growth studies during PECVD' conference; Tokyo University; 2004-04-01; 2004-04-01, 1/04/04 - 1/04/04, .

In situ plasma and film growth studies during PECVD. / Sanden, van de, M.C.M.

2010. conference; Tokyo University; 2004-04-01; 2004-04-01, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - In situ plasma and film growth studies during PECVD

AU - Sanden, van de,M.C.M.

PY - 2010

Y1 - 2010

M3 - Other

ER -

Sanden, van de MCM. In situ plasma and film growth studies during PECVD. 2010. conference; Tokyo University; 2004-04-01; 2004-04-01, .