In situ plasma and film growth studies during PECVD

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2010
Eventconference; Tokyo University; 2004-04-01; 2004-04-01 -
Duration: 1 Apr 20041 Apr 2004

Conference

Conferenceconference; Tokyo University; 2004-04-01; 2004-04-01
Period1/04/041/04/04
OtherTokyo University

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