| Original language | English |
|---|---|
| Publication status | Published - 2004 |
| Event | AIST Institute, Tsukuba, Japan - Duration: 3 Apr 2004 → 3 Apr 2004 |
Conference
| Conference | AIST Institute, Tsukuba, Japan |
|---|---|
| Period | 3/04/04 → 3/04/04 |
| Other | AIST Institute |
In situ plasma and film growth studies during PECVD
Research output: Contribution to conference › Other › Academic