In situ plasma and film growth studies during PECVD

Research output: Contribution to conferenceOther

Original languageEnglish
Publication statusPublished - 2004
EventAIST Institute, Tsukuba, Japan -
Duration: 3 Apr 20043 Apr 2004

Conference

ConferenceAIST Institute, Tsukuba, Japan
Period3/04/043/04/04
OtherAIST Institute

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