In situ plasma and film growth studies during PECVD

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2004
EventAIST Institute, Tsukuba, Japan -
Duration: 3 Apr 20043 Apr 2004

Conference

ConferenceAIST Institute, Tsukuba, Japan
Period3/04/043/04/04
OtherAIST Institute

Cite this

@conference{e97f1bf51d234465990eaad68bd1e522,
title = "In situ plasma and film growth studies during PECVD",
author = "{Sanden, van de}, M.C.M.",
year = "2004",
language = "English",
note = "AIST Institute, Tsukuba, Japan ; Conference date: 03-04-2004 Through 03-04-2004",

}

Sanden, van de, MCM 2004, 'In situ plasma and film growth studies during PECVD' AIST Institute, Tsukuba, Japan, 3/04/04 - 3/04/04, .

In situ plasma and film growth studies during PECVD. / Sanden, van de, M.C.M.

2004. AIST Institute, Tsukuba, Japan, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - In situ plasma and film growth studies during PECVD

AU - Sanden, van de, M.C.M.

PY - 2004

Y1 - 2004

M3 - Other

ER -