In-situ localized carbon nanotube growth inside partially sealed enclosures

Y.B. Burgt, van de, A. Champion, Y. Bellouard

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
93 Downloads (Pure)


Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. Our experiments raise interesting observations related to the gas diffusion dynamics in micro-scale and sub-micron enclosures.
Original languageEnglish
Pages (from-to)092119-1/6
Number of pages6
JournalAIP Advances
Issue number9
Publication statusPublished - 2013


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