In-situ fabrication of polymer microsieves for mu TAS by slanted angle holography

A.M. Prenen, A. Knopf, C.W.M. Bastiaansen, D.J. Broer

    Research output: Contribution to journalArticleAcademicpeer-review

    2 Citations (Scopus)

    Abstract

    We present a simple, versatile method for the in-situ fabrication of membranes inside a microfluidic channel during a chip manufacturing process using only two extra slanted angle holographic exposure steps. This method combines the strengths of both inclined UV exposure and holographic lithography to produce micrometer-sized three-dimensional sieving structures. Using a common chip material, the photoresist material SU-8, together with this method, a leak-free membrane-channel connection is obtained. The resulting membranes are monodisperse, with a very well-defined pore geometry (i.e., microsieves with a pore diameter between 500 nm and 10 μm) that is easily controllable with the holographic set-up. The selectivity of in-situ fabricated microsieves with a pore diameter of 2 μm will be demonstrated using polystyrene beads of 1 and 3 μm.
    Original languageEnglish
    Pages (from-to)1299-1304
    Number of pages6
    JournalMicrofluidics and Nanofluidics
    Volume10
    Issue number6
    DOIs
    Publication statusPublished - Jun 2011

    Keywords

    • Holography
    • Microsieves
    • Microfluidics
    • In-situ fabrication
    • Inclined lithography
    • SU-8

    Cite this

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    title = "In-situ fabrication of polymer microsieves for mu TAS by slanted angle holography",
    abstract = "We present a simple, versatile method for the in-situ fabrication of membranes inside a microfluidic channel during a chip manufacturing process using only two extra slanted angle holographic exposure steps. This method combines the strengths of both inclined UV exposure and holographic lithography to produce micrometer-sized three-dimensional sieving structures. Using a common chip material, the photoresist material SU-8, together with this method, a leak-free membrane-channel connection is obtained. The resulting membranes are monodisperse, with a very well-defined pore geometry (i.e., microsieves with a pore diameter between 500 nm and 10 μm) that is easily controllable with the holographic set-up. The selectivity of in-situ fabricated microsieves with a pore diameter of 2 μm will be demonstrated using polystyrene beads of 1 and 3 μm.",
    keywords = "Holography, Microsieves, Microfluidics, In-situ fabrication, Inclined lithography, SU-8",
    author = "A.M. Prenen and A. Knopf and C.W.M. Bastiaansen and D.J. Broer",
    year = "2011",
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    doi = "10.1007/s10404-010-0763-4",
    language = "English",
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    pages = "1299--1304",
    journal = "Microfluidics and Nanofluidics",
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    In-situ fabrication of polymer microsieves for mu TAS by slanted angle holography. / Prenen, A.M.; Knopf, A.; Bastiaansen, C.W.M.; Broer, D.J.

    In: Microfluidics and Nanofluidics, Vol. 10, No. 6, 06.2011, p. 1299-1304.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - In-situ fabrication of polymer microsieves for mu TAS by slanted angle holography

    AU - Prenen, A.M.

    AU - Knopf, A.

    AU - Bastiaansen, C.W.M.

    AU - Broer, D.J.

    PY - 2011/6

    Y1 - 2011/6

    N2 - We present a simple, versatile method for the in-situ fabrication of membranes inside a microfluidic channel during a chip manufacturing process using only two extra slanted angle holographic exposure steps. This method combines the strengths of both inclined UV exposure and holographic lithography to produce micrometer-sized three-dimensional sieving structures. Using a common chip material, the photoresist material SU-8, together with this method, a leak-free membrane-channel connection is obtained. The resulting membranes are monodisperse, with a very well-defined pore geometry (i.e., microsieves with a pore diameter between 500 nm and 10 μm) that is easily controllable with the holographic set-up. The selectivity of in-situ fabricated microsieves with a pore diameter of 2 μm will be demonstrated using polystyrene beads of 1 and 3 μm.

    AB - We present a simple, versatile method for the in-situ fabrication of membranes inside a microfluidic channel during a chip manufacturing process using only two extra slanted angle holographic exposure steps. This method combines the strengths of both inclined UV exposure and holographic lithography to produce micrometer-sized three-dimensional sieving structures. Using a common chip material, the photoresist material SU-8, together with this method, a leak-free membrane-channel connection is obtained. The resulting membranes are monodisperse, with a very well-defined pore geometry (i.e., microsieves with a pore diameter between 500 nm and 10 μm) that is easily controllable with the holographic set-up. The selectivity of in-situ fabricated microsieves with a pore diameter of 2 μm will be demonstrated using polystyrene beads of 1 and 3 μm.

    KW - Holography

    KW - Microsieves

    KW - Microfluidics

    KW - In-situ fabrication

    KW - Inclined lithography

    KW - SU-8

    U2 - 10.1007/s10404-010-0763-4

    DO - 10.1007/s10404-010-0763-4

    M3 - Article

    VL - 10

    SP - 1299

    EP - 1304

    JO - Microfluidics and Nanofluidics

    JF - Microfluidics and Nanofluidics

    SN - 1613-4982

    IS - 6

    ER -