In-situ fabrication of polymer microsieves for mu TAS by slanted angle holography

A.M. Prenen, A. Knopf, C.W.M. Bastiaansen, D.J. Broer

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2 Citations (Scopus)


We present a simple, versatile method for the in-situ fabrication of membranes inside a microfluidic channel during a chip manufacturing process using only two extra slanted angle holographic exposure steps. This method combines the strengths of both inclined UV exposure and holographic lithography to produce micrometer-sized three-dimensional sieving structures. Using a common chip material, the photoresist material SU-8, together with this method, a leak-free membrane-channel connection is obtained. The resulting membranes are monodisperse, with a very well-defined pore geometry (i.e., microsieves with a pore diameter between 500 nm and 10 μm) that is easily controllable with the holographic set-up. The selectivity of in-situ fabricated microsieves with a pore diameter of 2 μm will be demonstrated using polystyrene beads of 1 and 3 μm.
Original languageEnglish
Pages (from-to)1299-1304
Number of pages6
JournalMicrofluidics and Nanofluidics
Issue number6
Publication statusPublished - Jun 2011


  • Holography
  • Microsieves
  • Microfluidics
  • In-situ fabrication
  • Inclined lithography
  • SU-8

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