In-situ ellipsometric studies of the aSi:H growth using an expanding thermal plasma

A.H.M. Smets; P.M.E.J. Keijzers; I.J. Houston; M.C.M. Sanden, van de; D.C. Schram

In-situ ellipsometric studies of the aSi:H growth using an expanding thermal plasma

A.H.M. Smets, P.M.E.J. Keijzers, I.J. Houston, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 1998
Event	1st Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 1998) - Conference centre "Rolduc", Kerkrade, Netherlands Duration: 26 Nov 1998 → 27 Nov 1998

Workshop

Workshop	1st Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 1998)
Abbreviated title	WELTPP-1
Country/Territory	Netherlands
City	Kerkrade
Period	26/11/98 → 27/11/98

Bibliographical note

Poster presented at the 1st Euregional WELT-PP : Workshop on the Exploration of Low Temperature Plasma Physics, 26-27 November 1998, Kerkrade, THe Netherlands

Cite this

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title = "In-situ ellipsometric studies of the aSi:H growth using an expanding thermal plasma",

author = "A.H.M. Smets and P.M.E.J. Keijzers and I.J. Houston and {Sanden, van de}, M.C.M. and D.C. Schram",

note = "Poster presented at the 1st Euregional WELT-PP : Workshop on the Exploration of Low Temperature Plasma Physics, 26-27 November 1998, Kerkrade, THe Netherlands; 1st Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 1998), WELTPP-1 ; Conference date: 26-11-1998 Through 27-11-1998",

year = "1998",

language = "English",

}

TY - CONF

T1 - In-situ ellipsometric studies of the aSi:H growth using an expanding thermal plasma

AU - Smets, A.H.M.

AU - Keijzers, P.M.E.J.

AU - Houston, I.J.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

N1 - Poster presented at the 1st Euregional WELT-PP : Workshop on the Exploration of Low Temperature Plasma Physics, 26-27 November 1998, Kerkrade, THe Netherlands

PY - 1998

Y1 - 1998

M3 - Poster

T2 - 1st Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 1998)

Y2 - 26 November 1998 through 27 November 1998

ER -