In-line EUV beam monitoring using microwaves

F.M.J.H. van de Wetering

Research output: Contribution to conferencePosterAcademic

Conference

Conference29th edition of the Symposium series on Plasma Physics and Radiation Technology , 7 and 8 March 2017, Lunteren, Netherlands
CountryNetherlands
CityLunteren
Period7/03/178/03/17
Internet address

Cite this

van de Wetering, F. M. J. H. (2017). In-line EUV beam monitoring using microwaves. Poster session presented at 29th edition of the Symposium series on Plasma Physics and Radiation Technology , 7 and 8 March 2017, Lunteren, Netherlands, Lunteren, Netherlands.
van de Wetering, F.M.J.H./ In-line EUV beam monitoring using microwaves. Poster session presented at 29th edition of the Symposium series on Plasma Physics and Radiation Technology , 7 and 8 March 2017, Lunteren, Netherlands, Lunteren, Netherlands.
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author = "{van de Wetering}, F.M.J.H.",
year = "2017",
month = "3",
day = "7",
language = "English",
note = "29th edition of the Symposium series on Plasma Physics and Radiation Technology , 7 and 8 March 2017, Lunteren, Netherlands ; Conference date: 07-03-2017 Through 08-03-2017",
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van de Wetering, FMJH 2017, 'In-line EUV beam monitoring using microwaves' 29th edition of the Symposium series on Plasma Physics and Radiation Technology , 7 and 8 March 2017, Lunteren, Netherlands, Lunteren, Netherlands, 7/03/17 - 8/03/17, .

In-line EUV beam monitoring using microwaves. / van de Wetering, F.M.J.H.

2017. Poster session presented at 29th edition of the Symposium series on Plasma Physics and Radiation Technology , 7 and 8 March 2017, Lunteren, Netherlands, Lunteren, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - In-line EUV beam monitoring using microwaves

AU - van de Wetering,F.M.J.H.

PY - 2017/3/7

Y1 - 2017/3/7

M3 - Poster

ER -

van de Wetering FMJH. In-line EUV beam monitoring using microwaves. 2017. Poster session presented at 29th edition of the Symposium series on Plasma Physics and Radiation Technology , 7 and 8 March 2017, Lunteren, Netherlands, Lunteren, Netherlands.