In-line EUV beam monitoring using microwaves

F.M.J.H. van de Wetering

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 7 Mar 2017
Event29th edition of the Symposium series on Plasma Physics and Radiation Technology - Congress Hotel 'De Werelt', Lunteren, Netherlands
Duration: 7 Mar 20178 Mar 2017
http://www.plasmalunteren.nl/

Conference

Conference29th edition of the Symposium series on Plasma Physics and Radiation Technology
CountryNetherlands
CityLunteren
Period7/03/178/03/17
Internet address

Cite this

van de Wetering, F. M. J. H. (2017). In-line EUV beam monitoring using microwaves. Poster session presented at 29th edition of the Symposium series on Plasma Physics and Radiation Technology, Lunteren, Netherlands.