In-line EUV beam monitoring using microwaves

F.M.J.H. van de Wetering

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 7 Mar 2017
Event	29th edition of the Symposium series on Plasma Physics and Radiation Technology - Congress Hotel 'De Werelt', Lunteren, Netherlands Duration: 7 Mar 2017 → 8 Mar 2017 http://www.plasmalunteren.nl/

Conference	29th edition of the Symposium series on Plasma Physics and Radiation Technology
Country/Territory	Netherlands
City	Lunteren
Period	7/03/17 → 8/03/17
Internet address	http://www.plasmalunteren.nl/

Cite this

@conference{0275b12dfd554bfb8ef19caa0a0824e8,

title = "In-line EUV beam monitoring using microwaves",

author = "{van de Wetering}, F.M.J.H.",

year = "2017",

month = mar,

day = "7",

language = "English",

note = "29th edition of the Symposium series on Plasma Physics and Radiation Technology ; Conference date: 07-03-2017 Through 08-03-2017",

url = "http://www.plasmalunteren.nl/",

}