In-depth profiling with the electron probe microanalyzer

G.F. Bastin, J.M. Dijkstra, H.J.M. Heijligers, D. Klepper

Research output: Contribution to journalArticleAcademicpeer-review


A detailed description is given of the procedure followed in the development of a thin film anal. software package for application with the electron probe microanalyzer (EPMA) and scanning electron microscope (SEM). The software consists of 2 programs: 1 for the anal. of a single film, either on a substrate or unsupported (TFA), and 1 for the anal. of multilayers (MLA). The performance of the software was tested using existing data from literature and newly collected data presented. Special emphasis was placed on the use of the MLA program for the detn. of concn. profiles in-depth. The examples presented are nitrogen and oxygen implantation zones in silicon and concn. profiles in thin films of YBa2Cu3O7-x. Surprisingly detailed information can be collected from subsurface regions in the specimen; information that may be difficult to obtain by alternative techniques. [on SciFinder (R)]
Original languageEnglish
Pages (from-to)29-43
JournalMicrobeam Analysis
Issue number1
Publication statusPublished - 1993

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