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Impurity redistribution due to recrystallization of preamorphized silicon
R. Duffy, V.C. Venezia, K. van der Tak, M.J.P. Hopstaken, G.C.J. Maas, F. Roozeboom, Y. Tamminga, T. Dao
Research output: Contribution to journal › Article › Academic › peer-review
17
Citations
(Scopus)