Improving uniformity of atmospheric-pressure dielectric barrier discharges using dual frequency excitation

Y. Liu, F.J.J. Peeters, S.A. Starostin, M.C.M. van de Sanden, H.W. de Vries

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Abstract

This letter reports a novel approach to improve the uniformity of atmospheric-pressure dielectric barrier discharges using a dual-frequency excitation consisting of a low frequency (LF) at 200 kHz and a radio frequency (RF) at 13.56 MHz. It is shown that due to the periodic oscillation of the RF electric field, the electron acceleration and thus the gas ionization is temporally modulated, i.e. enhanced and suppressed during each RF cycle. As a result, the discharge development is slowed down with a lower amplitude and a longer duration of the LF discharge current. Hence, the RF electric field facilitates improved stability and uniformity simultaneously allowing a higher input power.

Original languageEnglish
Article number01LT01
Number of pages6
JournalPlasma Sources Science and Technology
Volume27
Issue number1
DOIs
Publication statusPublished - 1 Jan 2018

Keywords

  • atmospheric pressure plasma
  • dielectric barrier discharge
  • dual frequency
  • plasma uniformity

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