Abstract
RF signals from mobile phones or WLAN transmitters can affect DC parametric measurements. A transistor test structure inside a wafer prober can behave as a GHz receiver when the needles or the manipulators that probe these transistors pick up sufficiently strong GHz signals. This paper shows examples of such occurrences and presents a technique for assessing the vulnerability of parametric measurement systems for GHz signals.
Original language | English |
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Title of host publication | Proceedings of the IEEE International Conference on Microelectronics Test Structures, 2006, ICMTS 2006, 6-9 March 2006, Austin, Texas |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 71-75 |
ISBN (Print) | 1-4244-0167-4 |
DOIs | |
Publication status | Published - 2006 |
Event | conference; International Conference on Microelectronics Test Structures, March 2006 - Duration: 1 Jan 2006 → … |
Conference
Conference | conference; International Conference on Microelectronics Test Structures, March 2006 |
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Period | 1/01/06 → … |
Other | International Conference on Microelectronics Test Structures, March 2006 |