Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices

N. Aslam, V. Longo, C. Rodenbücher, F. Roozeboom, W.M.M. Kessels, K. Szot, R. Waser, S. Hoffmann-Eifert

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