Impact of Al2O3 ALD growth and properties on passivation quality of p‐polySi/Al2O3 stacks

Jimmy Melskens; R.J. Theeuwes; Wolfhard Beyer; Mark Steltenpool; W.M.M. Kessels; Arthur W. Weeber; Agnes Mewe

Impact of Al2O3 ALD growth and properties on passivation quality of p‐polySi/Al2O3 stacks

Jimmy Melskens, R.J. Theeuwes, Wolfhard Beyer, Mark Steltenpool, W.M.M. Kessels, Arthur W. Weeber, Agnes Mewe

Research output: Contribution to conference › Poster

Original language	English
Publication status	Unpublished - 2022
Event	12th International Conference on Crystalline Silicon Photvoltaics 2022 - Konzil, Konstanz, Germany Duration: 28 Mar 2022 → 1 Apr 2022 https://www.siliconpv.com/?msclkid=60b8603bb42511ec82a3188944278207

Conference

Conference	12th International Conference on Crystalline Silicon Photvoltaics 2022
Abbreviated title	SiliconPV Conference
Country/Territory	Germany
City	Konstanz
Period	28/03/22 → 1/04/22
Internet address	https://www.siliconpv.com/?msclkid=60b8603bb42511ec82a3188944278207

12th International Conference on Crystalline Silicon Photvoltaics 2022
Roel J. Theeuwes (Participant)
28 Mar 2022 → 30 Mar 2022
Activity: Participating in or organising an event types › Conference › Scientific

Cite this

@conference{cd462c0a5252468bbaf2cab115a18653,

title = "Impact of Al2O3 ALD growth and properties on passivation quality of p‐polySi/Al2O3 stacks",

author = "Jimmy Melskens and R.J. Theeuwes and Wolfhard Beyer and Mark Steltenpool and W.M.M. Kessels and Weeber, {Arthur W.} and Agnes Mewe",

year = "2022",

language = "English",

note = "12th International Conference on Crystalline Silicon Photvoltaics 2022, SiliconPV Conference ; Conference date: 28-03-2022 Through 01-04-2022",

url = "https://www.siliconpv.com/?msclkid=60b8603bb42511ec82a3188944278207",

}

TY - CONF

T1 - Impact of Al2O3 ALD growth and properties on passivation quality of p‐polySi/Al2O3 stacks

AU - Melskens, Jimmy

AU - Theeuwes, R.J.

AU - Beyer, Wolfhard

AU - Steltenpool, Mark

AU - Kessels, W.M.M.

AU - Weeber, Arthur W.

AU - Mewe, Agnes

PY - 2022

Y1 - 2022

M3 - Poster

T2 - 12th International Conference on Crystalline Silicon Photvoltaics 2022

Y2 - 28 March 2022 through 1 April 2022

ER -

Impact of Al2O3 ALD growth and properties on passivation quality of p‐polySi/Al2O3 stacks

Conference

Activities

12th International Conference on Crystalline Silicon Photvoltaics 2022

Cite this