Impact of Al2O3 ALD growth and properties on passivation quality of p‐polySi/Al2O3 stacks

Jimmy Melskens, R.J. Theeuwes, Wolfhard Beyer, Mark Steltenpool, W.M.M. Kessels, Arthur W. Weeber, Agnes Mewe

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusUnpublished - 2022
Event12th International Conference on Crystalline Silicon Photvoltaics 2022 - Konzil, Konstanz, Germany
Duration: 28 Mar 20221 Apr 2022
https://www.siliconpv.com/?msclkid=60b8603bb42511ec82a3188944278207

Conference

Conference12th International Conference on Crystalline Silicon Photvoltaics 2022
Abbreviated titleSiliconPV Conference
Country/TerritoryGermany
CityKonstanz
Period28/03/221/04/22
Internet address

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