| Original language | English |
|---|---|
| Patent number | P-1991.000-US |
| Publication status | Published - 2005 |
Immersion hood with wafer edge seal pre-fill function preventing floating bubbles
C.C.M. Luijten (Inventor)
Research output: Patent › Patent publication
C.C.M. Luijten (Inventor)
Research output: Patent › Patent publication
| Original language | English |
|---|---|
| Patent number | P-1991.000-US |
| Publication status | Published - 2005 |