Fingerprint
Dive into the research topics of 'Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage
Robbert Voorhoeve (Corresponding author), Robin de Rozario, Wouter Aangenent, Tom Oomen
Research output: Contribution to journal › Article › Academic › peer-review
29
Citations
(Scopus)
485
Downloads
(Pure)