Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage

Robbert Voorhoeve (Corresponding author), Robin de Rozario, Wouter Aangenent, Tom Oomen

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

Increasingly stringent performance requirements for motion control necessitate the use of increasingly detailed models of the system behavior. Motion systems inherently move, therefore, spatiotemporal models of the flexible dynamics that are essential. In this article, a two-step approach for the identification of the spatiotemporal behavior of mechanical systems is developed and applied to a lightweight prototype industrial wafer stage. The proposed approach exploits a modal modeling framework and combines recently developed powerful linear-time-invariant (LTI) identification tools with a spline-based mode-shape interpolation approach to estimate the spatial system behavior. The experimental results for the wafer-stage application confirm the suitability of the proposed approach for the identification of complex position-dependent mechanical systems and its potential for motion control performance improvements.
Original languageEnglish
Article number9011610
Pages (from-to)194-206
Number of pages13
JournalIEEE Transactions on Control Systems Technology
Volume29
Issue number1
DOIs
Publication statusPublished - 1 Jan 2021

Keywords

  • Precision mechatronics
  • system identification

Fingerprint Dive into the research topics of 'Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage'. Together they form a unique fingerprint.

Cite this