Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

T.A.E. Oomen, S.J. Quist, R.M.A. Herpen, van, O.H. Bosgra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

14 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	5530-5535-
DOIs	https://doi.org/10.1109/CDC.2010.5717797
Publication status	Published - 2010
Event	49th IEEE Conference on Decision and Control (CDC 2010) - Atlanta, United States Duration: 15 Dec 2010 → 17 Dec 2010 Conference number: 49

Conference	49th IEEE Conference on Decision and Control (CDC 2010)
Abbreviated title	CDC 2010
Country/Territory	United States
City	Atlanta
Period	15/12/10 → 17/12/10

Access to Document

Oomen, T. A. E., Quist, S. J., Herpen, van, R. M. A., & Bosgra, O. H. (2010). Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. In Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA (pp. 5530-5535-). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CDC.2010.5717797

Oomen, T.A.E. ; Quist, S.J. ; Herpen, van, R.M.A. et al. / Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA. Piscataway : Institute of Electrical and Electronics Engineers, 2010. pp. 5530-5535-

@inproceedings{c65719d0932c42fe85213144116adc47,

title = "Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage",

author = "T.A.E. Oomen and S.J. Quist and {Herpen, van}, R.M.A. and O.H. Bosgra",

year = "2010",

doi = "10.1109/CDC.2010.5717797",

language = "English",

pages = "5530--5535--",

booktitle = "Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "49th IEEE Conference on Decision and Control (CDC 2010), CDC 2010 ; Conference date: 15-12-2010 Through 17-12-2010",

}

Oomen, TAE, Quist, SJ, Herpen, van, RMA & Bosgra, OH 2010, Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. in Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA. Institute of Electrical and Electronics Engineers, Piscataway, pp. 5530-5535-, 49th IEEE Conference on Decision and Control (CDC 2010), Atlanta, Georgia, United States, 15/12/10. https://doi.org/10.1109/CDC.2010.5717797

Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. / Oomen, T.A.E.; Quist, S.J.; Herpen, van, R.M.A. et al.
Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA. Piscataway: Institute of Electrical and Electronics Engineers, 2010. p. 5530-5535-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

AU - Oomen, T.A.E.

AU - Quist, S.J.

AU - Herpen, van, R.M.A.

AU - Bosgra, O.H.

N1 - Conference code: 49

PY - 2010

Y1 - 2010

U2 - 10.1109/CDC.2010.5717797

DO - 10.1109/CDC.2010.5717797

M3 - Conference contribution

SP - 5530-5535-

BT - Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

T2 - 49th IEEE Conference on Decision and Control (CDC 2010)

Y2 - 15 December 2010 through 17 December 2010

ER -

Oomen TAE, Quist SJ, Herpen, van RMA, Bosgra OH. Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. In Proceedings of the 49th IEEE Conference on Decision and Control (CDC 2010), 15-17 December 2010, Atlanta, GA, USA. Piscataway: Institute of Electrical and Electronics Engineers. 2010. p. 5530-5535- doi: 10.1109/CDC.2010.5717797